Methods of bonding two aluminum-comprising masses to one another
AssigneeHoneywell International Inc.
InventorJaeyeon Kim
Life of this patent
Estimating the term…
Abstract
The invention encompasses a method of bonding a first mass to a second mass. A first mass of first material and a second mass of second material are provided and joined in physical contact with one another. The first and second masses are then diffusion bonded to one another simultaneously with the development of grains of the second material in the second mass. The diffusion bonding comprises solid state diffusion between the first mass and the second mass. A predominate portion of the developed grains in the second material have a maximum dimension of less than 100 microns. The invention also encompasses methods of forming a physical vapor deposition target bonded to a backing plate.
Claims13
A method of bonding a first aluminum-comprising mass to a second aluminum-comprising mass, comprising:
- providing a first aluminum-comprising mass and a second aluminum-comprising mass, the first aluminum-comprising mass having a first surface and the second aluminum-comprising mass having a second surface;
- exposing at least one of the first and second surfaces to a mixture comprising HF and HNO3;
- after the exposing, physically contacting the first surface with the second surface;
- pressing the first and second mass together to bond the first mass to the second mass;
- and
- wherein the first and second aluminum-comprising masses correspond to a backing plate and a physical vapor deposition target, respectively, and wherein the pressing comprises:
- joining the target and backing plate in physical contact with one another;
- compressing the target and backing plate together under a load that progresses sequentially as follows:
- (1) the load is maintained of a first pressure of at least about 4 ksi for a time of at least about 20 seconds;
- (2) the load is increased by at least about 0.5 ksi to a second pressure;
- and
- (3) the load is maintained at the second pressure for at least about 20 seconds.
Dependencies are inferred from the claim text.