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US 6,837,076 B2Granted
Method of producing oxide soot using a burner with a planar burner face
AssigneeCorning Incorporated
InventorDaniel W. Hawtof
Life of this patent
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Abstract
A burner and a method for producing an inorganic soot such as silica comprising a plurality of substantially planar layers having multiple openings therethrough formed by a micromachining process. The openings are in fluid communication with a precursor inlet and a gas inlet to permit the gas and the precursor to flow through and exit the burner. The burner produces a flame from a combustible gas in which the precursor undergoes a chemical reaction to form the soot.
Claims6
A method of making oxide soot comprising the steps of:
- providing a burner comprising a first substantially planar layer having a first opening therethrough;
- a second substantially planar layer having a planar surface defining a burner face, the layer having a second opening therethrough and being bonded to the first layer such that the first and second openings are generally aligned to form an orifice in a central region of the burner;
- a plurality of gas openings having dimensions less than about 150 microns through the burner face for allowing a combustible gas and auxiliary gasses to exit the burner;
- gas channels in fluid communication with the gas openings;
- and precursor channels in fluid communication with the orifice;
- flowing the combustible gas and auxiliary gas through the gas channels and gas openings;
- igniting the combustible gas to provide a flame;
- flowing precursor through the precursor channels, through the orifice and into the flame to combust the precursor and form the oxide soot.
5 more elements
Dependencies are inferred from the claim text.