System and method for controlling thin film defects

A method of depositing a thin film, the method comprising the steps of:

• a) determining if a substrate is in position to begin sputtering;
• b) igniting a plasma for sputtering a target;
• c) rotating said target relative to a plasma to sputter said target and remove redeposition material from said target;
• and
• d) transporting said substrate in front of said target to deposit a thin film on said substrate;
• and
• e) extinguishing said plasma once said substrate is no longer in front of said target.

A system for reducing defects on a substrate during sputter deposition comprising:

• a target rotatable about an axis and having an outside surface;
• a power supply to supply a voltage to said target, said voltage sufficient to generate a plasma;
• a magnet operatively positioned relative to said target and producing a magnetic field sufficient to penetrate said target to confine said plasma near a portion of the outside surface of said target upon application of said voltage to said target, said portion of the outside surface of said target exposed to said plasma;
• a rotatable holder for rotating said target along said axis and relative to said magnet, and upon complete rotation of said target, a substantial portion of said outside surface of said target is exposed to said plasma;
• a transport for moving a substrate in front of said target;
• and
• a controller for igniting and extinguishing said plasma according to said substrate position.

A system for reducing defects on a substrate during sputter deposition, comprising:

• a target with an outside surface;
• means for determining a substrate position;
• means for igniting and extinguishing plasma according to said substrate position;
• means for confining said plasma to expose a portion of the outside surface of said target to said plasma;
• means for rotating said target to expose substantially all of the outside surface of said target to said plasma;
• and
• means for moving said substrate in front of said target.