Electro-optical device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kunitaka Yamamoto, Yasuyuki Arai
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kunitaka Yamamoto, Yasuyuki Arai
Estimating the term…
The present invention aims to provide simple, high-speed processing for the formation of an EL layer by an ink-jet method. A method of manufacturing an electro-optical device having good operation performance and high reliability, and in particular, a method of manufacturing an EL display device, is provided. The present invention forms EL layers continuously across a plurality of pixels when the EL layers are formed by the ink-jet method. Specifically, with respect to m columns and n rows of pixel electrodes arranged in a matrix state, the EL layers are formed so as to form stripes with respect to one certain selected row or one column. The EL layers may also be formed having an oblong shape or a rectangular shape with respect to each pixel electrode.
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
A method of manufacturing an electro-optical device, said method comprising the steps of:
Dependencies are inferred from the claim text.
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Active-matrix OLED [AMOLED] displays: insulating layers formed between TFT elements and OLED elements
Using printing techniques, e.g. ink-jet printing or screen printing: using ink-jet printing
Characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes: characterised by the doping profiles, e.g.…
Characterised by the doping profiles, e.g. having lightly-doped source or drain extensions: the source and the drain regions being asymmetrical
Term ended 29 Sep 2021 (estimated)
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1. Field of the Invention
The present invention relates to an electro-optical device typified by an EL (electroluminescence) display device formed by fabricating semiconductor elements (elements using a semiconductor thin film) on a surface of a substrate, and an electronic device including the electro-optical device as a display. Particularly, the invention relates to a method of manufacturing the same.
2. Description of the Related Art
FIGS. 1A to 1C are diagrams for explaining the concept of continuously forming EL layers by an ink-jet method according to the present invention;
FIGS. 2A and 2B are diagrams for explaining the concept of forming EL layers so as to form stripes or continuously forming the EL layers with respect to pixel electrodes arranged in a matrix state of the present invention;
FIGS. 3A and 3B are diagrams for explaining an ink-jet method of the present invention;
FIGS. 1A to 1C are diagrams for explaining the concept of the present invention. FIG. 1A shows a structure in which a pixel portion 102, a scanning line side driver circuit 103, and a data line side driver circuit 104 are formed on a substrate 101. Separation layers 105 are formed so as to form stripes in the pixel portion 102, and EL layers are formed between each separation layer. The separation layers 105 are formed in order that adjacent EL layers do not mutually mix when forming the EL layers by an ink-jet method.
EL layers 106 are formed by discharging a liquid containing an EL material from an ink head 107. There are no particular limitations on EL layer materials, but to perform color display EL layers 106R, 106G, and 106B may be formed corresponding to red, green, and blue, respectively.
FIGS. 2A and 2B are diagrams for explaining details of the formation of the EL layers in the pixel portion. In FIG. 2A, a plurality of current control TFTs 122 and a plurality of pixel electrodes 123 for connecting to the current control TFTs are formed, corresponding to each pixel, and arranged in a matrix state in the pixel portion 120, and the state of an EL layer 121 formed so as to form stripes corresponding to a selected row or column of the pixel electrodes is shown. EL layers 121R, 121G, and 121B corresponding to red, green, and blue, respectively, may be formed as shown in the figure for performing color display.