Methods and systems for determining a presence of macro and micro defects on a specimen

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy;
• a local processor coupled to the measurement device and configured to at least partially process the one or more output signals during use;
• and
• a remote controller computer coupled to the local processor, wherein the remote controller computer is configured to receive the at least partially processed one or more output signals and to determine a first property and a second property of the specimen from the at least partially processed one or macro output signals during use, wherein the first property comprises a presence of macro defects on the specimen, and wherein the second property comprises a presence of micro defects on the specimen.