Method of measuring electrical capacitance

A method of measuring electrical capacitance in which a scanning capacitance microscope detects at least one surface by means of at least one electrically conductive probe used to measure the electrical capacitance of at least one semiconductor surface, the method comprising:

• forming a clean surface on at least one semiconductor sample by surface treatment;
• promptly placing the at least one semiconductor sample on which a clean surface was formed in an ultrahigh vacuum environment or an inert gas environment and maintaining therein;
• and
• measuring the electrical capacitance of the at least one semiconductor sample surface or maintained in the ultrahigh vacuum environment or in the inert gas environment with the at least one electrically conductive probe, wherein the at least one electrically conductive probe has an insulating film formed thereon.