Method and apparatus for specimen fabrication

A specimen fabrication method comprising:

• a process of forming a separation trench enclosing an area on a specimen substrate to be separated from the specimen substrate as a micro-specimen by adopting an ion-beam sputtering fabrication method wherein an ion beam is irradiated to the specimen substrate to form the separation trench;
• a process of separating the area enclosed by the separation trench from the specimen substrate as the micro-specimen;
• and
• a process of transferring the micro-specimen separated from the specimen substrate to a remote micro-specimen holder of an observation apparatus and fixing the micro-specimen to the micro-specimen holder.

A specimen fabrication method wherein a micro-specimen including an area on a specimen substrate to be observed is separated from the specimen substrate and the micro-specimen is then introduced into an observation apparatus to undergo observation of the area on the specimen substrate to be observed, the specimen fabrication method comprising:

• a marking process of putting marks on a surface of a specimen substrate to identify an area on the specimen substrate to be observed in an observation apparatus;
• a process of forming from the specimen substrate a micro-specimen including the marks and the area on the specimen substrate to be observed, the micro-specimen having a wedge-shaped cross section and being attached to the specimen substrate by a residual support portion, comprising
• creating a trench perpendicular to a surface of the specimen substrate and partially enclosing the marks and the area on the specimen substrate to be observed by irradiating an ion beam to the specimen substrate while the surface of the specimen substrate is in a level state, and
• creating a trench inclined with respect to the surface of the specimen substrate and partially enclosing the marks and the area on the specimen substrate to be observed while leaving the residual support portion by irradiating an ion beam to the specimen substrate while the surface of the specimen substrate is in an inclined state;
• a process comprising
• returning the surface of the specimen substrate to the level state,
• bringing a portion of a specimen transferring unit into contact with the micro-specimen, and
• forming a deposition film on a contact portion between the portion of the specimen transferring unit and the micro-specimen by irradiating an ion beam to the contact portion while supplying raw material gas for creating the deposition film to the contact portion, wherein the deposition film fixes the portion of the specimen transferring unit to the micro-specimen at the contact portion;
• a process of separating the micro-specimen from the specimen substrate by cutting the residual support portion by which the micro-specimen is attached to the specimen substrate by irradiating an ion beam to the residual support portion;
• a process comprising
• driving the specimen transferring unit to transfer the micro-specimen to a vicinity of a micro-specimen holder of the observation apparatus,
• driving the specimen transferring unit to bring the micro-specimen into contact with the micro-specimen holder, and
• forming a deposition film on a contact portion between the micro-specimen and the micro-specimen holder by irradiating an ion beam to the contact portion while supplying raw material gas for creating the deposition film to the contact portion, wherein the deposition film fixes the micro-specimen to the micro-specimen holder at the contact portion;
• and
• a process of separating the portion of the specimen transferring unit from the micro-specimen after the micro-specimen has been fixed to the micro-specimen holder.