Chemical treating apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsShigehiro Goto, Katsushi Yoshioka, Minobu Matsunaga
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Abstract
A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto. The apparatus includes a treating solution delivery nozzle for delivering the treating solution to the principal surface of a substrate. The nozzle has a treating solution reservoir adjacent a tip end thereof for storing the treating solution. A temperature control device holds the treating solution reservoir to control the temperature of the treating solution in the treating solution reservoir through heat exchange with the treating solution.
Claims20
A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto, said apparatus comprising:
- a treating solution delivery nozzle for delivering the treating solution supplied through a treating solution pipe to the principal surface of the substrate;
- a treating solution reservoir disposed adjacent a tip end of said treating solution delivery nozzle for storing the treating solution;
- and
- temperature control means movable away from said treating solution reservoir for holding said treating solution reservoir during a time of temperature control to control temperature of the treating solution in said treating solution reservoir through heat exchange with the treating solution.
A chemical treating apparatus for performing a predetermined treatment of a principal surface of a substrate by delivering a treating solution thereto, said apparatus comprising:
- a treating solution delivery nozzle for delivering the treating solution, supplied through a treating solution pipe, to the principal surface of the substrate;
- a treating solution reservoir disposed adjacent a tip end of said treating solution delivery nozzle for storing the treating solution;
- and
- temperature control means movable away from said treating solution reservoir for contacting or approaching at least a major part of one of surfaces defining said treating solution reservoir during a time of temperature control to control temperature of the treating solution in said treating solution reservoir through heat exchange with the treating solution.
Dependencies are inferred from the claim text.