Method of manufacturing a fluid injection device
AssigneeBenq Corporation
InventorsIn-Yao Lee, Chih-Ching Chen
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Abstract
A method of manufacturing a fluid injection device. The method of the present invention applies a compensated geometric shape of the unetched isolating portions to increase the additional compensated portion for etching, or the ion implanting process to reduce the etching rate of the unetched isolating portions. Thus, crosstalk or overshoot in the isolating portions of the fluid injection device can be reduced, and the fluid injection device can be precisely manufactured in a small size.
Claims20
A method of manufacturing a fluid injection device, the fluid injection device having a plurality of fluid chambers and a plurality of isolating portions separating the fluid chambers, the isolating portions being formed with a predetermined geometric shape, the method comprising the steps of:
- providing a substrate;
- providing a mask with a compensating pattern thereon;
- coating a photoresist layer on the substrate;
- deploying the compensating pattern onto the photoresist layer to determine a plurality of unetched isolating portions, wherein the unetched isolating portions are formed with a compensated geometric shape larger than the predetermined geometric shape;
- and
- etching the substrate to form the isolating portions with the predetermined geometric shape.
A method of manufacturing a fluid injection device, the fluid injection device having a plurality of fluid chambers and a plurality of isolating portions separating the fluid chambers, the isolating portions being formed with a predetermined geometric shape, the method comprising the steps of:
- providing a substrate;
- performing ion implanting on a predetermined area on the substrate for the isolating portions;
- and
- etching the substrate to form the isolating portions with the predetermined geometric shape.
A method of manufacturing a fluid injection device, the fluid injection device having a plurality of fluid chambers and a plurality of isolating portions separating the fluid chambers, the isolating portions being formed with a predetermined geometric shape, the method comprising the steps of:
- providing a substrate;
- providing a mask with a pattern thereon;
- coating a photoresist layer on the substrate;
- deploying the pattern onto the photoresist layer to determine a plurality of isolating geometries, wherein the isolating geometries are formed larger than the predetermined geometric shape;
- and
- etching the substrate to form the isolating portions with the predetermined geometric shape, wherein the isolating portions comprise at least one extrusion to prevent the adjacent fluid chambers from crosstalk in ejecting the fluid.
Dependencies are inferred from the claim text.