Liquid phase growth method and liquid phase growth apparatus

A liquid phase growth method comprising:

• dipping a seed substrate in a solution in a vessel having a crystal raw material melted therein;
• and
• growing a crystal on the seed substrate,
• wherein a first fin is provided on a bottom of the vessel, for regulating a flow of the solution from a central portion outside in a radial direction in the vessel,
• wherein a second fin is provided on an inner sidewall of the vessel, for regulating a flow of the solution from the bottom upwardly, and
• wherein the vessel is rotated while regulating a flow of the solution by an action of the first and the second fins to bring the solution into contact with the seed substrate.

A liquid phase growth method comprising:

• dipping a seed substrate in a solution in a vessel having a crystal raw material melted therein;
• and
• growing a crystal on the seed substrate,
• wherein a fin is provided on a bottom of the vessel, for regulating a flow of the solution from a central portion outside in a radial direction in the vessel,
• wherein a flow-regulating plate is provided in the vicinity of an inner sidewall of the vessel, for regulating a flow of the solution from the bottom upwardly, and
• wherein the vessel is rotated while regulating a flow of the solution by an action of the fin and the flow-regulating plate to bring the solution into contact with the seed substrate.

A liquid phase growth apparatus comprising:

• a vessel housing a solution containing a crystal raw material;
• dipping means for dipping a substrate in the solution;
• and
• moving means for moving the substrate in a plane direction thereof in a state in which the substrate is dipped in the solution by the dipping means.

A liquid phase growth apparatus comprising:

• a vessel for housing a solution having a crystal raw material melted therein;
• and
• substrate support means for supporting and dipping a seed substrate in the solution,
• wherein a first fin is provided on a bottom of the vessel radially in a radial direction thereof and a second fin is provided on an inner sidewall of the vessel.

A liquid phase growth apparatus comprising:

• a vessel for housing a solution having a crystal raw material melted therein;
• and
• substrate support means for supporting and dipping a seed substrate in the solution,
• wherein a flow-regulating plate is provided in the vicinity of an inner sidewall of the vessel perpendicularly to a surface of the solution.

A liquid phase growth apparatus comprising:

• a vessel for housing a solution having a crystal raw material melted therein;
• and
• substrate support means for supporting and dipping a seed substrate in the solution,
• wherein a fin is provided on a bottom of the vessel radially in a radial direction thereof,
• wherein a flow-regulating plate is provided in the vicinity of an inner sidewall of the vessel perpendicularly to a surface of the solution, and
• wherein the vessel is provided with rotating means.