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US 6,823,589 B2Granted
Flexibly suspended gas distribution manifold for plasma chamber
AssigneeApplied Materials, Inc.
InventorsJohn M. White, Ernst Keller, Wendell T. Blonigan
Life of this patent
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Abstract
A method of flexibly mounting a gas distribution plate to the back wall of a gas inlet manifold for a plasma chamber. A perforated gas distribution plate is suspended from the back wall by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate.
Claims16
A method of mounting a gas distribution plate to the back wall of a gas inlet manifold, comprising the steps of:
- providing a back wall perforated by a gas inlet orifice;
- providing a gas distribution plate perforated by a number of gas outlet orifices;
- providing a suspension comprising a number of side wall segments, wherein each side wall segment includes a first end, a second end, and a flexible portion extending between the first end and the second end;
- attaching the first end of each side wall segment to the gas distribution plate so that the flexible portion of each side wall segment abuts the gas distribution plate;
- and
- attaching the second end of each side wall segment to the back wall so that the flexible portion of each side wall segment abuts the back wall.
3 more elements
Dependencies are inferred from the claim text.