Electro-optic phase-only spatial light modulator

An electro-optic spatial light modulator comprising:

• an electro-optic wafer,
• a partially reflecting dielectric mirror deposited on the top face of the electro-optic wafer,
• a transparent electrode formed on top of the partially reflecting dielectric mirror,
• a totally reflecting dielectric mirror formed on the bottom face of the electro-optic wafer, wherein the electro-optic wafer is sandwiched between the totally reflecting bottom mirror and the partially reflecting dielectric mirror so as to form an asymmetric Fabry-Perot cavity,
• a circuitry wafer,
• a metal conductor formed on top of the circuitry wafer, the metal conductor being segmented into an array of electrode pads, and
• a plurality of electronic voltage sources formed in the circuitry wafer, each electronic voltage source being located behind a corresponding electrode pad so as to eliminate a need for connection leads between the electrode pads and external voltage sources, each electronic voltage source also applying a voltage between the corresponding electrode pad and the transparent conductor,
• wherein the electro-optic wafer and the circuitry wafer are bonded without being aligned with respect to one another in a predetermined manner.

An electro-optic spatial light modulator comprising:

• an electro-optic wafer formed from lead-lanthanum-zirconate-titanate (PLZT),
• a transparent electrode formed on top of the electro-optic wafer,
• a totally reflecting dielectric mirror formed on the bottom face of the electro-optic wafer,
• a silicon wafer,
• a metal conductor formed on top of the silicon wafer, the metal conductor being segmented into an array of electrode pads, and
• a plurality of electronic voltage sources formed in the silicone wafer, each electronic voltage source being located next to a corresponding electrode pad and being applied between the corresponding electrode pad and the transparent electrode,
• wherein the electro-optic wafer and the silicon wafer are bonded together without being aligned with respect to one another in a predetermined manner.