Solid state system and method for generating ultraviolet light
AssigneePositive Light, Inc.
InventorsWilliam Michael Tulloch, Alan Reilly Fry, Jeremy Weston, William Eugene White, Eric Alan Wilson
Life of this patent
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Abstract
Infrared laser light generated by a solid state diode pumped transform-limited Ti:Sapphire laser is converted to UV wavelengths using third and fourth harmonic generation systems. The resulting output is tunable between approximately 187 and 333 nm. The combined solid state Ti:Sapphire laser and harmonic generation system includes feedback mechanisms for improved power and wavelength stability. The system can operate at pulse repetition rates of several thousand Hertz.
Claims11
A system for generating a pulsed light output having a wavelength on the order of 193 nm comprising:
- a Ti:Sapphire laser for generating laser radiation;
- a solid state pump laser generating a pulsed output for pumping the Ti:Sapphire laser;
- a seed laser generating laser radiation which is injected into the Ti:Sapphire laser to lock the output of the Ti:Sapphire laser to the wavelength of the laser radiation of the seed laser;
- and
- a harmonic generator including at least a second harmonic generating optic and a fourth harmonic generating optic, wherein the harmonic generator converts the laser radiation from the Ti:Sapphire laser into the fourth harmonic thereof and with the seed laser, pump laser and Ti:Sapphire laser being configured so that the fourth harmonic output corresponds to a wavelength of about 193 nm, said fourth harmonic output being pulsed with a repetition rate of at least 5 kHz and having an average power of at least 2 mW.
A system for generating stable pulsed light output comprising:
- a Ti:Sapphire laser for generating laser radiation;
- a solid state pump laser generating a pulsed output for pumping the Ti:Sapphire laser;
- a seed laser generating laser radiation which is injected into the Ti:Sapphire laser to lock the output of the Ti:Sapphire laser to the wavelength of the laser radiation of the seed laser;
- a harmonic generator including harmonic optics for converting the laser radiation generated by the Ti:Sapphire laser into higher harmonics thereof;
- a first platform for supporting the Ti:Sapphire laser;
- and
- a second platform for supporting the pump laser, said second platform being coupled to said first platform by a vibration damping means.
Dependencies are inferred from the claim text.