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US 6,815,690 B2Granted
Ion beam source with coated electrode(s)
AssigneeGuardian Industries Corp.
InventorsVijayen S. Veerasamy, Rudolph Hugo Petrmichl, Henry A. Luten
Life of this patent
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Abstract
An ion source includes an anode and/or cathode which is/are coated with a conductive coating. The coating has a sputtering yield less than that of an uncoated anode and/or cathode, so that erosion of the resulting anode and/or cathode in the source is reduced during source operation. Example coating materials for the anode and/or cathode of the ion beam source include metal borides including but not limited to TiB2 and ZrB2.
Claims22
An ion source comprising:
- an anode and a cathode, with an electric gap defined between the anode and the cathode;
- and
- wherein each of the anode and cathode is at least partially coated with a conductive coating comprising a metal boride.
An ion source comprising:
- a conductive anode and a conductive cathode, with a gap defined between the anode and the cathode;
- and
- wherein the ion source is manufactured so that each of the anode and cathode is at least partially coated with a coating comprising a metal boride.
An ion source comprising:
- a conductive anode and a conductive cathode, with an electric gap defined between the anode and the cathode;
- and
- wherein the ion source is manufactured so that at least one of the anode and cathode is at least partially coated with a conductive coating having a sputtering yield of no more than about 20% of the sputtering yield of an uncoated anode or cathode, the conductive coating having such a sputtering yield of no more than about 20% of that of an uncoated anode or cathode given a reference gas of acetylene (C2H2) being fed through the ion source.
An ion source comprising:
- a conductive anode and a conductive cathode, with a gap defined between the anode and the cathode;
- and
- wherein the ion source is manufactured so that each of the anode and cathode is at least partially coated with a coating comprising each of:
- a boride, a nitride, and a carbide.
1 more element
Dependencies are inferred from the claim text.