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AssigneeKLA-Tencor Technologies Corporation
InventorsGabor D. Toth, John A. Notte, IV, Richard A. Price
Estimating the term…
Method and apparatus for imaging at multiple perspectives of a specimen are disclosed. In one embodiment, an apparatus for generating a multi-perspective image using multiple charged particle beams (e.g., electron beams) is disclosed. In one embodiment, the apparatus generally includes a charged particle beam generator system arranged to generate and control a first charged particle beam directed substantially at a first angle towards the specimen and a second charged particle beam directed substantially at a second angle towards the specimen. The apparatus also includes an image generator arranged to generate one or more images based on charged particles emitted from the specimen in response to the first and second charged particle beams and a controller arranged to cause the charged particle beam generator to direct both the first charged particle beam and the second charged particle beam at a first area of the specimen. In a specific implementation, the charged particles are in the form of electrons and the apparatus is a dual electron beam scanning electron microscope (SEM).
An apparatus for generating an image from a specimen, comprising:
A method of generating an image of a specimen with a scanning electron microscope (SEM) having an electron beam generator for directing a first electron beam substantially towards the specimen at a first angle relative to a surface of the specimen and for directing a second electron beam substantially towards the specimen at a second angle relative to a surface of the specimen, at least one detector for detecting electrons that are emitted from the specimen, and an image generator for generating the image of the specimen from the emitted electrons, the method comprising:
Dependencies are inferred from the claim text.