Method for fabricating pattern, apparatus for fabricating pattern, conductive film wiring, method for fabricating device, electro-optical apparatus, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorHironori Hasei
Life of this patent
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Abstract
A method and an apparatus for fabricating a pattern which makes it possible to obtain a wide pattern having edges of a preferable shape. The apparatus for fabricating a pattern ejects a liquid material as liquid droplets from an ejecting section, and dispose the liquid droplets on a substrate in a line-shaped pattern. A plurality of line-shaped patterns are formed on the substrate by disposing a plurality of liquid droplets on the substrate in the line-shaped patterns, and then another set of liquid droplets are disposed between the line-shaped patterns so as to integrate the line-shaped patterns with each other.
Claims11
A method for fabricating a pattern, in which a liquid material is ejected as liquid droplets from a liquid droplet ejecting section, the method comprising:
- forming a plurality of first patterns on a substrate by disposing the liquid droplets under a first ejecting condition;
- and
- integrating the plurality of first patterns with each other by disposing the liquid droplets between the plurality of first patterns under a second ejecting condition, the first ejecting condition being different from the second ejecting condition.
A method for fabricating a device that includes a substrate and a conductive film wiring formed on the substrate, the method comprising:
- forming a pattern on the substrate by ejecting a liquid material as liquid droplets from a liquid droplet ejecting section,
- forming a pattern includes:
- forming a plurality of first patterns that are substantially parallel to each other by disposing the liquid droplets on the substrate under a first ejecting condition;
- and
- integrating the plurality of first patterns with each other by disposing the liquid droplets between the plurality of first patterns under a second ejecting condition, the first ejecting condition being different from the second ejecting condition.
Dependencies are inferred from the claim text.