Article comprising MEMS-based two-dimensional e-beam sources and method for making the same
AssigneeSamsung Electronics Co., Ltd.
InventorSungho Jin
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Abstract
In accordance with the invention, an electron beam source for exposing selected portions of a surface to electrons comprises a plurality of nanoscale electron emitters and, associated with each electron emitter, a directional control element to direct the emitter toward a selected portion of the surface. In a preferred embodiment, the emitters are nanotubes or nanowires mounted on electrostatically controlled MEMS directional control elements. An alternative embodiment uses electrode directional control elements.
Claims16
A device for exposing selected portions of a surface to electrons comprising:
- a plurality of nanoscale electron emitters, each nano scale electron emitter oriented for emitting a directional beam of electrons toward the surface;
- and
- associated with each electron emitter a directional control element comprising a movable support element supporting the nanoscale emitter to control the direction of the emitter beam toward the selected portions of the surface.
A method of exposing selected portions of a surface to electrons comprising the steps of:
- providing a plurality of nanoscale electron emitters;
- inducing electron beams from the emitters;
- and
- separately controlling the orientations of the nanoscale emitters to direct the beams to the selected portions of the surface.
The method of claim the beam directions are controlled by separately deflecting the emitted beams.
A method for providing an optical display comprising the steps of:
- providing a layer of material that can generate light from an incident electron beam;
- and
- exposing selected portions of the layer by the process of claim to generate light in an optical display.
Dependencies are inferred from the claim text.