Method and apparatus for local surface analysis

An apparatus for performing a surface analysis of a sample, comprising:

• an enclosure configured to contain a sample having a surface;
• a gas mixture introducing portion configured to introduce a gas mixture into the enclosure;
• a maintaining portion configured to maintain the gas mixture in a predefined condition at close proximity to the surface;
• a probe beam provider configured to provide a probe beam at a predefined location on the surface of the sample so as to create an etching on the location;
• a laser beam provider configured to provide at least one laser beam to an etching product released from the location so as to produce at least one ion;
• an accelerating portion configured to accelerate the at least one ion;
• and
• a mass spectrometer configured to perform a mass spectrometry on the accelerated at least one ion.

A method of performing a surface analysis of a sample, comprising:

• providing a gas mixture near a surface of the sample, the mixture comprising one or more reactive gases;
• applying a probe beam on a location of the surface such that the interaction between the probe beam, the gas mixture and the sample surface takes place and results in a compound being released from the surface;
• ionizing the compound so as to generate at least one ion;
• and
• performing a mass spectrometry analysis on the at least one ion.

An apparatus for performing a surface analysis of a sample, comprising:

• a gas mixture providing portion configured to provide a gas mixture near a surface of the sample, the mixture comprising one or more reactive gases;
• a probe beam provider configured to provide a probe beam on a location of the surface such that the interaction between the probe beam, the gas mixture and the sample surface takes place and results in a compound being released from the surface;
• a laser beam provider configured to provide at least one laser beam to the compound so as to generate at least one ion;
• and
• a mass spectrometer configured to perform a mass spectrometry analysis on the at least one ion.

An apparatus for performing a surface analysis of a sample, comprising:

• means for providing a gas mixture near a surface of the sample, the mixture comprising one or more reactive gases;
• means for applying a probe beam on a location of the surface such that the interaction between the probe beam, the gas mixture and the sample surface takes place and results in a compound being released from the surface;
• means for ionizing the compound so as to generate at least one ion;
• and
• means for performing a mass spectrometry analysis on the at least one ion.