US 6,807,519 B2 · Methods of forming radiation-patterning tools; carrier waves and computer readable media

Abstract

The invention includes a method for placement of sidelobe inhibitors on a radiation-patterning tool. Elements of the tool are represented by design features in a modeling domain. The modeling domain is utilized to generate vectors spanning between edges of design features within a threshold spatial distance of one another. Locations of vector midpoints are identified. The locations are utilized in identifying areas where sidelobe overlap is likely. The areas are shifted from the modeling domain to a real domain, and in the real domain correspond to regions of the tool where sidelobe overlap is likely to occur. Sidelobe inhibitors are formed across at least some of the identified regions of the tool. The invention includes computer readable code that can enable a computer to determine locations for placement of the sidelobe inhibitors.

Claims50

Dependent claims

A method for placement of sidelobe inhibitors on a radiation-patterning tool, comprising:

defining elements which will be formed in the radiation-patterning tool, and defining a wavelength of radiation that will be passed through the elements to create primary patterns and sidelobes proximate the primary patterns;
forming a mathematical description of the relative spatial orientations of the elements, the elements being represented in the mathematical description by design features, the mathematical description being defined as a modeling domain and the elements being defined as a real domain;
using the modeling domain to generate vectors spanning between edges of design features within a threshold spatial distance of one another;
identifying locations corresponding to midpoints of the vectors;
shifting at least some of the locations from the modeling domain to the real domain to identify regions of the tool where sidelobe overlap will occur;
and
forming sidelobe inhibitors across at least some of the identified regions of the tool.

4 more elements

A method of forming a radiation-patterning tool, comprising:

defining a pattern which is to be formed in a radiation-sensitive material by a wavelength of light passing through the radiation-patterning tool;
calculating elements to include in the radiation-patterning tool to form the pattern;
the calculating including creation of a mathematical description of relative spatial orientations of the elements, the elements being represented in the mathematical description by design features, the mathematical description being defined as a modeling domain and the elements being defined as a real domain;
using the modeling domain to generate vectors spanning between edges of design features within a threshold spatial distance of one another;
determining locations where at least two vector midpoints converge to within an overlap distance;
after determining the locations, performing an optical proximity correction on the design features, the optical proximity correction being included within the calculating of the elements;
after the optical proximity correction, taping the elements onto the radiation-patterning tool;
shifting the locations from the modeling domain to the real domain to identify sidelobe problem regions of the tool where sidelobe overlap will occur;
and
forming sidelobe inhibitors across at least some of the identified sidelobe problem regions of the tool.

7 more elements

Dependencies are inferred from the claim text.

Methods of forming radiation-patterning tools; carrier waves and computer readable media

Life of this patent

Methods of forming radiation-patterning tools; carrier waves and computer readable media

Life of this patent

Abstract

Claims50