Scheduling method and program for a substrate processing apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsNobuhiro Mukuta, Jun Kawai
Life of this patent
Estimating the term…
Abstract
A method of preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrate. The method comprising the steps of determining the timing of using each resource in advance of starting an actual processing of the substrates, defining a capacity resource as a resource usable within a maximum quantity of consumption of a consumer item used by the resources, and using the resources in processing the substrates while avoiding a total quantity of the consumer item used by the resources exceeding the maximum quantity of consumption of the capacity resource.
Claims20
A method of preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrates, said method comprising the steps of:
- determining the timing of using each resource in advance of starting processing of the substrates;
- defining a capacity resource as a resource usable within a maximum quantity of consumption of a consumer item used by said resources;
- and
- controlling a computer for using said resources in processing the substrates such that, when a total quantity of said consumer item used by said resources exceeds said maximum quantity of consumption of said capacity resource, the use of the resource responsible for exceeding said maximum quantity of consumption is deferred until after a waiting time, while leaving undeferred the resources allocated before said total quantity exceeds said maximum quantity.
A program for preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrates, said program comprising the steps of:
- determining the timing of using each resource in advance of starting processing of the substrates;
- defining a capacity resource as a resource usable within a maximum quantity of consumption of a consumer item used by said resources;
- and
- controlling a computer for using said resources in processing the substrates such that, when a total quantity of said consumer item used by said resources exceeds said maximum quantity of consumption of said capacity resource, the use of the resource responsible for exceeding said maximum quantity of consumption is deferred until after a waiting time, while leaving undeferred the resource allocated before said total quantity exceeds said maximum quantity.
A method of preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrates, said method comprising the steps of:
- determining the timing of using each resource in advance of starting processing of the substrates;
- defining a capacity resource as a resource usable within a maximum quantity of a waste discharged from said resources;
- and
- controlling a computer for using said resources in processing the substrates such that, when a total quantity of said waste discharged from said resources exceeds said maximum quantity of discharge of said capacity resource the use of the resource responsible for exceeding said maximum quantity of discharge is deferred until after a waiting time, while leaving undeferred the resources allocated before said total quantity exceeds said maximum quantity.
A program for preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrates, said program comprising the steps of:
- determining the timing of using each resource in advance of starting processing of the substrates;
- defining a capacity resource as a resource usable within a maximum quantity of a waste discharged from said resources;
- and
- controlling a computer for using said resources in processing the substrates such that, when a total quantity of said waste discharged from said resources exceeds said maximum quantity of discharge of said capacity resource, the use of the resource responsible for exceeding said maximum quantity of discharge is deferred until after a waiting time, while leaving undeferred the resources allocated before said total quantity exceeds said maximum quantity.
Dependencies are inferred from the claim text.