US 6,807,251 B2 · X-ray diffraction apparatus

Abstract

In the measurement with the focusing method, an X-ray beam from an X-ray source passes through an opening of a path-selection slit device and is narrowed by a divergence slit with a predetermined divergence angle and is thereafter incident upon a sample. The changing operation from the focusing method into the parallel beam method is carried out by turning, by 180 degrees, the path-selection slit device around its axis of rotation and by moving the divergence slit in a direction perpendicular to an X-ray traveling direction. Then, the X-ray beam from the X-ray source is reflected by a multilayer mirror to become a parallel beam and passes through the opening of the path-selection slit device and is thereafter incident upon the sample. Thus, the turning of the path-selection slit device enables the change between the focusing method and the parallel beam method, requiring no re-setting operation for the optical system.

Claims7

Dependent claims

X-ray diffraction apparatus in which an X-ray source emits an X-ray beam which is incident upon a sample, diffracted by said sample and detected by an X-ray detector, comprises:

(a) a first incident path along which said X-ray beam is incident upon said sample with a predetermined divergence angle;
(b) a second incident path along which said X-ray beam is reflected by a parabolic multilayer mirror to become a parallel beam and thereafter incident upon said sample;
(c) a path-selection slit device which can open any one of said first incident path and said second incident path whereas close off the other of said first incident path and said second incident path;
(d) an X-ray source in which a position of X-ray generation does not vary independently upon selection of said first incident path or said second incident path;
and
(e) a sample holder in which a center position of said sample does not vary independently upon selection of said first incident path or said second incident path.

3 more elements

Dependencies are inferred from the claim text.

X-ray diffraction apparatus

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X-ray diffraction apparatus

Life of this patent

Abstract

Claims7