Projection aligner
AssigneePENTAX Corporation
InventorsYoshinori Kobayashi, Shigetomo Ishibashi, Masato Hara
Life of this patent
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Abstract
The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.
Claims19
A projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed, said projection aligner comprising:
- a projection optical system that forms the image of said mask pattern onto said object;
- an expansion ratio determiner that measures lengths of said object in first and second directions and determines first and second expansion ratios based on said lengths, said first and second expansion ratios being expansion ratios of said object in said first and second directions, respectively;
- and
- a magnification controller that adjusts the magnification of said projection optical system to a value between said first and second expansion ratios.
A projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed, said projection aligner comprising:
- a projection optical system that forms the image of said mask pattern onto said object;
- a length determiner that measures lengths of said mask and said object in first and second directions;
- and
- a magnification controller that adjusts the magnification of said projection optical system to a value between first and second size ratios, said first and second size ratios being ratios of the length of said object to the length of said mask in said first and second directions, respectively.
A projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed, said mask including a plurality of local mask areas, said object including a plurality of local object areas, each local mask area including a portion of said mask pattern that is to be transferred onto different one of said plurality of local object areas, said projection aligner comprising:
- a projection optical system that forms the image of said mask pattern onto said object;
- a length determiner that measures lengths of each of said local mask areas and said local object areas in both first and second directions;
- a size ratio determiner that determines first and second size ratios for each of said local object areas, said first and second size ratios being ratios of the length of said local object area to the length of said local mask area in said first and second directions, respectively;
- and
- a magnification controller that adjusts the magnification of said projection optical system to a value between first and second mean size ratios, said first mean size ratios being a mean value of said first size ratios and said second mean size ratios being a mean value of said second size ratios.
Dependencies are inferred from the claim text.