Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer

A micro mirror unit comprising:

• a micro mirror substrate including a plurality of mirror-formed portions, a plurality of frames each surrounding a respective one of the mirror-formed portions, first torsion bars connecting each of the mirror-formed portions to a respective one of the first frames, a second frame surrounding each of the first frames, and second torsion bars connecting each of the first frames to the second frame;
• a wiring substrate formed with a wiring pattern;
• and
• a plurality of electroconductive spacers for electrically connecting the micro mirror substrate to the wiring pattern and for spacing the micro mirror substrate and the wiring substrate apart from each other,
• wherein the second frame includes, for each of the first frames, a plurality of electroconductive islands electrically separated from each other, each of the electroconductive spacers being connected to a respective one of the electroconductive islands.