Loading patent…
AssigneeAgilent Technologies, Inc.
InventorsGeorge M. Clifford, Jr., William Gong
Estimating the term…
The invention provides a system and method for reliably and accurately measuring the gap between two materials when the depth of gap is less than the smallest distance that an optical thickness gauge (OTG) is able to measure. The invention is practiced by forming a suitable slot (or a groove, channel, hole or other suitable deformation) having a precisely known depth in at least one material. The sum of the distance of the gap and the depth of the slot is at least equal to the smallest distance that the OTG can measure. The slot is positioned over the materials and under the OTG probe head such that a cavity is formed. The depth of the cavity is measured. Since the distance of the slot is known, the depth of the gap is determined by subtracting the known depth of the slot from the measured depth of the cavity.
A system for measuring a distance between materials using a light source, the system comprising:
A method for measuring distance between two optical materials, the method comprising:
An optical measurement system comprising a distance-measurement-offset recess disposed in a first optical material, the distance-measurement-offset recess located in an optical measurement transmission path to provide a distance information between at least two reflecting surfaces, the distance information including a distance offset corresponding to a depth of the recess.
Dependencies are inferred from the claim text.