Wavefront and intensity analyzer for collimated beams
AssigneeZygo Corporation
InventorLeslie L. Deck
Life of this patent
Estimating the term…
Abstract
Interferometeric apparatus for analyzing the wavefront and intensity distribution of collimated beams from fiber optic collimators, lasers, and the like. The collimated beams are directed through a plate beamsplitter and combined with a well defined diverging, spherical reference beam preferably generated by a single mode fiber. Reference and test beams are directed through an optical assembly for changing magnification to selectively control lateral resolution at a detector plane. Phase shifting analysis is performed on the resultant interference patterns to analyze the wavefront, and intensity profile is determined as a separate step.
Claims23
Interferometric apparatus for analyzing collimated beams, said apparatus comprising:
- means for mounting and aiming a test device adapted to generate a nominally collimated test beam to be analyzed;
- means for generating a spherical diverging reference beam;
- a bulk optic element for combining said nominally collimated test beam and said reference beam for travel along a common path;
- an optical assembly for receiving said nominally collimated test beam and said reference beam as they travel along said common path and producing an interference pattern containing information about the shape of the wavefront of said nominally collimated beam;
- means for detecting the intensity variation over said interference pattern and generating an electrical signal indicative of said information;
- and
- analytical means for receiving said electrical signal and determining the shape of said wavefront.
Interferometric apparatus for analyzing collimated beams, said apparatus comprising:
- means for mounting and aiming a test device adapted to generate a nominally collimated test beam to be analyzed;
- bulk optic means for picking off a portion of said nominally collimated test beam, generating a spherical diverging reference beam, and combining said nominally collimated test beam and said spherical diverging reference beam for travel along a common path;
- an optical assembly for receiving said nominally collimated test beam and said spherical diverging reference beam as they travel along said common path and producing an interference pattern containing information about the shape of the wavefront of said nominally collimated beam;
- means for detecting the intensity variation over said interference pattern and generating an electrical signal indicative of said information;
- and
- analytical means for receiving said electrical signal and determining the shape of said wavefront.
Dependencies are inferred from the claim text.