Loading patent…
AssigneeSeiko Epson Corporation
InventorMasayuki Kikushima
Estimating the term…
In a tuning-fork piezoelectric resonator element, a quartz wafer is subjected to wet etching such that the lengthwise, widthwise, and thickness directions of resonating arms are oriented corresponding to the Y-axis, X-axis, and Z-axis of quartz crystal, lengthwise grooves are provided on principal surfaces of the resonating arms so that the center lines thereof are placed offset in the -X-direction from the center lines of the resonating arms, thereby balancing the stiffness between the right and left portions in the widthwise direction of the resonating arms, and stabilizing bending of the resonating arms. In a production process for the tuning-fork piezoelectric resonator element, the offset in the widthwise direction caused between the upper and lower principal surfaces of the resonating arms by the misalignment of photomasks is adjusted by shifting the relative positions of the grooves in the widthwise direction so that the centers of gravity of upper and lower portions of the widthwise cross section of the resonating arms divided into two equally in the thickness direction are aligned on the same line perpendicular to the principal surfaces. Consequently, the displacement in the thickness direction of the resonating arms during excitation is resolved or reduced, and loss of strain energy due to vibration leakage is prevented. By reducing the CI value, high performance and high performance stability are achieved.
A tuning-fork piezoelectric resonator element made of a piezoelectric material having etching anisotropy in a predetermined direction, the tuning-fork piezoelectric resonator element comprising:
A tuning-fork piezoelectric resonator element, comprising:
A production method of a tuning-fork piezoelectric resonator element, the method comprising:
A production method of a tuning-fork piezoelectric resonator element, the method comprising:
Dependencies are inferred from the claim text.