SAW filter using tetrahedral amorphous carbon and method for manufacturing the same
AssigneeLG Electronics Inc.
InventorJin Koog Shin
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Abstract
Disclosed is an element using a piezoelectric characteristic, and in particular, an SAW filter and a method for manufacturing the same. The SAW filter according to the invention is resistant to input wave of high power by employing ta-C or CNT as an acoustic wave transmission medium. The method for manufacturing the SAW filter according to the invention simplified the manufacturing process and reduced a transmission loss as well noise.
Claims13
A method for manufacturing a surface acoustic wave (SAW) filter, comprising:
- forming a tetrahedral amorphous carbon (ta-C) film on a substrate, wherein the ta-C film is deposited on the substrate by means of arc discharge with respect to black lead;
- forming a conductive film on the ta-C film;
- patterning the conductive film;
- and
- forming a piezoelectric material on the patterned conductive film.
A method for manufacturing a surface acoustic wave (SAW) filter, comprising:
- forming a tetrahedral amorphous carbon (ta-C) film on a substrate, wherein the ta-C film is formed to have a thickness less than 1 μm;
- forming a conductive film on the ta-C film;
- patterning the conductive film;
- and
- forming a piezoelectric material on the patterned conductive film.
A method for manufacturing a surface acoustic wave (SAW) filter, comprising:
- forming a tetrahedral amorphous carbon (ta-C) film on a substrate, wherein the ta-C is deposited on the substrate by means of laser ablation using black lead;
- forming a conductive film on the ta-C film;
- patterning the conductive film;
- and
- forming a piezoelectric material on the patterned conductive film.
A method for manufacturing a surface acoustic wave (SAW) filter, comprising:
- forming a tetrahedral amorphous carbon (ta-C) film on a substrate;
- forming a conductive film on the ta-C film;
- patterning the conductive film;
- and
- forming a piezoelectric material on the patterned conductive film, wherein the piezoelectric material is composed of ZnO to have a thickness less than 2.5 μm.
A method for manufacturing a surface acoustic wave (SAW) filter, comprising:
- forming a tetrahedral amorphous carbon (ta-C) film on a substrate;
- forming a conductive film on the ta-C film;
- patterning the conductive film;
- and
- forming a piezoelectric material on the patterned conductive film, wherein the surface of the piezoelectric material undergoes a hardening abrasion.
Dependencies are inferred from the claim text.