Back to results
US 6,806,720 B2Granted
Method of reliability testing
AssigneeInfineon Technologies AG
InventorRolf-P. Vollersten
Life of this patent
Estimating the term…
Abstract
A method of reliability testing is disclosed. A critical breakdown resistance of a device is determined. The test structure is subjected to stress conditions and electrically tested. The critical breakdown time of the test structure is recorded when the operating resistance of the test structure is equal or smaller than the critical breakdown resistance.
Claims38
A method of reliability testing comprising:
- providing a test structure;
- determining a critical breakdown resistance of the test structure, wherein the critical breakdown resistance of the test structure causes a circuit to fail;
- subjecting the test structure to stress conditions;
- repetitively determining an operating resistance of the test structure;
- and
- recording a critical breakdown time when the operating resistance of the test structure is equal or smaller than the critical breakdown resistance.
3 more elements
A method of reliability testing, the method comprising:
- providing a test structure;
- determining a critical breakdown resistance of the test structure;
- subjecting the test structure to stress conditions;
- measuring an electrical characteristic of the test structure to determine an operating resistance of the test structure;
- comparing the operating resistance of the test structure to the critical breakdown resistance;
- repeating the subjecting, measuring and comparing steps until the operating resistance is less than or equal to the critical breakdown resistance;
- and
- recording a critical breakdown time when the operating resistance is less than or equal to the critical breakdown resistance.
5 more elements
Dependencies are inferred from the claim text.