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US 6,806,484 B2Granted
Sub-micron accuracy edge detector
AssigneeAgilent Technologies, Inc.
InventorsEdward Steketee, John Bernard Medberry, Benno Guggenheimer
Life of this patent
Estimating the term…
Abstract
An edge detector with sub-micron accuracy. The edge detector comprises two single mode optical fibers with an optical path between them. One fiber is coupled to a laser light source, and creates a light beam. The other fiber is coupled to an optical power detector. The optical power reaching the optical power detector is determined by how much of the light beam is obscured by an object. Thus the position of the edge of the object may be determined from the optical power measured by the detector. The edge of an object may be positioned automatically according to the optical power measured by the detector.
Claims42
An edge detector for detecting an edge of an object, said edge detector comprising:
- a first optical fiber, with a receiving end and a transmitting end, adapted to receive laser light at the receiving end and create a light beam at the transmitting end;
- a second optical fiber, with a receiving end and a transmitting end, positioned such that the receiving end of the second optical fiber receives the light beam and transmits light to the transmitting end of the second optical fiber;
- and
- a single optical power detector optically coupled to the transmitting end of the second optical fiber, the optical power detector having an output P indicative of the optical power of the light transmitted through the second optical fiber, the output P having a maximum value Pmax when no object is within the light beam and a minimum value Pmin when the object is fully within the light beam;
- and
- a retainer for holding the transmitting end of the first optical fiber and the receiving end of the second optical fiber such that the receiving end of the second optical fiber receives the light beam from the transmitting end of the first optical fiber;
- wherein the edge of the object is detected when the object partially obstructs the light beam, such that the output P of the single optical power detector is less than the maximum value Pmax and greater than the minimum value Pmin, and wherein at least one of the first and second optical fibers comprises a single-mode fiber.
4 more elements
An edge detector for detecting an edge of an object, said edge detector comprising:
- a first optical fiber, with a receiving end and a transmitting end, adapted to receive laser light at the receiving end and create a light beam at the transmitting end;
- a second optical fiber, with a receiving end and a transmitting end, positioned such that the receiving end of the second optical fiber receives the light beam and transmits light to the transmitting end of the second optical fiber;
- a single optical power detector optically coupled to the transmitting end of the second optical fiber, the optical power detector having an output P indicative of the optical power of the light transmitted through the second optical fiber, the output P having a maximum value Pmax when no object is within the light beam and a minimum value Pmin when the object is fully within the light beam;
- and
- a mirror positioned to reflect said light beam;
- wherein the receiving end of the second optical fiber receives the light beam after it has been reflected by the mirror and wherein the edge of the object is detected when the object partially obstructs the light beam, such that the output P of the single optical power detector is less than the maximum value Pmax and greater than the minimum value Pmin.
3 more elements
A device for positioning an edge of an object, said device comprising:
- a laser light source;
- a first optical fiber, with a receiving end and a transmitting end, optically coupled to the laser light source at the receiving end and creating a light beam at the transmitting end;
- an optical power detector, providing an optical power signal P as output, the optical power signal having a maximum value Pmax when no object is within the light beam and a minimum value Pmin when the object is fully within the light beam;
- a second optical fiber, with a receiving end and a transmitting end, optically coupled to the optical power detector at the transmitting end;
- a retainer for holding said first and second optical fibers such that the receiving end of the second optical fiber receives the light beam;
- a positioning stage for adjusting the relative positions of the object and the light beam;
- and
- a controller operably coupled to the positioning stage and responsive to the optical power signal, the controller being configured to cause the positioning stage to position the edge of the object at a predetermined position within the light beam, such that the level of the optical power signal P is less than the maximum value Pmax and greater than the minimum value Pmin,
- wherein at least one of the first and second optical fibers comprises a single-mode fiber.
6 more elements
An edge detector for detecting an edge of an object, said edge detector comprising:
- a first optical fiber, with a receiving end and a transmitting end, adapted to receive laser light at the receiving end and create a light beam at the transmitting end;
- a second optical fiber, with a receiving end and a transmitting end, positioned such that the receiving end of the second optical fiber receives the light beam and transmits light to the transmitting end of the second optical fiber;
- a single optical power detector optically coupled to the transmitting end of the second optical fiber, the optical power detector having an output P indicative of the optical power of the light transmitted through the second optical fiber, the output P having a maximum value Pmax when no object is within the light beam and a minimum value Pmin when the object is fully within the light beam;
- an optical coupler having at least three ports, the optical coupler being adapted to receive laser light at a first port of the at least three ports, coupled to the receiving end of the first optical fiber at a second port of the at least three ports and coupled to the receiving end of the second optical fiber at a third port of the at least three ports;
- a mirror separated from the transmitting end of the first optical fiber by a gap and positioned to receive the laser light beam and reflect it back to the transmitting end of the optical fiber;
- and
- a retainer for holding the first optical fiber and the mirror;
- wherein the edge of the object is detected when an object in the gap at least partially obstructs the light beam, causing a change in the output P of the optical power meter and wherein the edge of the object is detected when the object partially obstructs the light beam, such that the output P of the single optical power detector is less than the maximum value Pmax and greater than the minimum value Pmax.
5 more elements
A system for detecting an edge of an object, said system comprising:
- an edge detector, said edge detector comprising:
- a first optical fiber, with a receiving end and a transmitting end, adapted to receive laser light at the receiving end and create a light beam at the transmitting end;
- a second optical fiber, with a receiving end and a transmitting end, positioned such that the receiving end of the second optical fiber receives the light beam and transmits light to the transmitting end of the second optical fiber;
- an optical power detector optically coupled to the transmitting end of the second optical fiber, the optical power detector having an output P indicative of the optical power of the light transmitted through the second optical fiber, the output P having a maximum value Pmax when no object is within the light beam and a minimum value Pmin when the object is fully within the light beam;
- and
- a retainer for holding the transmitting end of the first optical fiber and the receiving end of the second optical fiber such that the receiving end of the second optical fiber receives the light beam from the transmitting end of the first optical fiber;
- an object positioning stage for adjusting the position of the object in a first direction;
- and
- a detector positioning stage for adjusting the position of the edge detector in a second direction;
- wherein the edge of the object is detected when the object partially obstructs the light beam, such that the output P of the optical power detector is less than the maximum value Pmax and greater than the minimum value Pmin, and wherein at least one of the first and second optical fibers comprises a single mode optical fiber.
7 more elements
A method for positioning an edge of an object, said method comprising:
- generating a light beam by passing light from a laser light source through a first optical fiber;
- receiving the light beam from the first optical fiber through a second optical fiber;
- detecting the optical power of the received light;
- and
- positioning the edge of the object within the light beam such that the second optical fiber is partially obscured and the optical power of the received light is greater than a lower threshold and less than an upper threshold,
- wherein the first and second mode fibers comprise single mode optical fibers held in a retainer such that the light beam from the first optical fiber is received by the second optical fiber.
3 more elements
A method for positioning an edge of an object, said method comprising:
- generating a light beam by passing light from a laser light source through a first optical fiber;
- receiving the light beam from the first optical fiber through a second optical fiber;
- detecting the optical power of the received light;
- and
- positioning the edge of the object within the light beam such that the second optical fiber is partially obscured and the optical power of the received light is greater than a lower threshold and less than an upper threshold;
- wherein generating the light beam further comprises:
- passing the laser light to an optical coupler, the optical coupler being coupled to the first optical fiber at a first port and to the second optical fiber at a second port;
- and
- passing the laser light through a third optical fiber, coupled at a first end to a third port of the optical coupler, the light beam being generated at a second end of the third optical fiber;
- and wherein receiving the light beam further comprises:
- receiving the light at the second end of the third optical fiber after it has been reflected by a mirror, the mirror being separated from the second end of the third optical fiber by a gap and positioned to receive the light beam and reflect it back to the second end of the third optical fiber;
- passing the received light from the third optical fiber to the third port of the optical coupler;
- and
- passing the received light from the second port of the optical coupler to the second optical fiber.
11 more elements
Dependencies are inferred from the claim text.