Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
AssigneeCanon Kabushiki Kaisha
InventorsKenji Saito, Toshihiko Tsuji, Mitsuro Sugita
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Abstract
A position detection device for detecting a position of an object. The detection device includes an irradiation device for irradiating light onto an alignment mark formed on a surface of the object, a probe for detecting near-field light in the vicinity of the alignment mark upon irradiation by the irradiation device and a detector for detecting position information of the object on the basis of the near-field light detected by the probe.
Claims20
A position detection device for detecting a position of an object on which an alignment mark and a resist covering the alignment mark are formed, said device comprising:
- an illuminator for illuminating the alignment mark with pumping light, wherein the pumping light has a wavelength longer than a thickness of the resist;
- a probe for detecting near-field light generated by the alignment mark upon irradiation of the pumping light;
- and
- a detection system for detecting the position of the object based on the detection by said probe.
A pattern detecting device for detecting a pattern which is covered by a resist, said device comprising:
- an illuminator for illuminating the pattern with pumping light, wherein said pumping light has a wavelength longer than a thickness of the resist;
- and
- a probe for receiving near-field light generated by the pattern upon irradiation of the pumping light to detect the pattern.
Dependencies are inferred from the claim text.