Quasi-CW diode pumped, solid-state UV laser system and method employing same
AssigneeElectro Scientific Industries, Inc.
InventorsYunlong Sun, Richard S. Harris
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AssigneeElectro Scientific Industries, Inc.
InventorsYunlong Sun, Richard S. Harris
Estimating the term…
A quasi-CW diode- or lamp-pumped, A-O Q-switched solid-state UV laser system (10) synchronizes timing of the quasi-CW pumping with movement of the positioning system (36) to reduce pumping while the positioning system (36) is moving from one target area (31) to the next target area (31) to form multiple vias in a substrate at a high throughput. Thus, the available UV power for via formation is higher even though the average pumping power to the laser medium (16), and thermal loading of the laser pumping diodes (14), remains the same as that currently available through conventional CW pumping with conventionally available laser pumping diodes (14). The quasi-CW pumping current profile can be further modified to realize a preferred UV pulse amplitude profile.
A method for machining with a laser system through at least one layer of target material at multiple target areas on a work piece, the laser system employing a solid-state laser medium and a pumping source, the solid-state laser medium being limited in an amount of pumping power that the solid-state laser medium can tolerate over an extended period of time due to thermally-induced distortion, comprising:
Dependencies are inferred from the claim text.