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US 6,806,344 B2Granted
Poly-o-hydroxamide, polybenzoxazole, and electronic component including a dielectric having a barrier effect against copper diffusion, and processes for preparing poly-o-hydroxyamides, polybenzoxazoles, and electronic components
AssigneeInfineon Technologies AG
InventorsRecai Sezi, Andreas Walter, Anna Maltenberger, Klaus Lowack
Life of this patent
Estimating the term…
Abstract
Novel poly-o-hydroxyamides can be cyclized to give polybenzoxazoles which have a good diffusion barrier effect with respect to metals. The poly-o-hydroxyamides can be applied to a semiconductor substrate by customary techniques and converted into the polybenzoxazole in a simple manner by heating. This results in a good barrier layer with respect to diffusion of metals. This allows the diffusion barrier between conductor track and dielectric to be substantially dispensed.
Claims15
A poly-o-hydroxyamide having a formula I
- wherein:
- Y2 is
- Y1 and Y3, in each case independently of one another, are a substituent selected from the group consisting of:
- Z1, Z2, and Z3, in each case independently, are substituents selected from the group consisting of:
- A, if at least one of a=0 and d=1, is a substituent selected from the group consisting of:
- A, if at least one of a=1 and d=0, is a substituent selected from the group consisting of:
- E is a substituent selected from the group consisting of:
- W is a substituent selected from the group consisting of:
- T is a substituent selected from the group consisting of:
- *—O—* *—S—*
- Q is
- *—O—* *—S—*
- R1 is a substituent selected from the group consisting of:
- R2 is a substituent selected from the group consisting of —H, —CF3, —OH, —SH, —COOH, —N(R5)2, an alkyl group, an aryl group, a heteroaryl group and
- R3 is a substituent selected from the group consisting of:
- *—O—*
- *—S—* *—SO2—* *—S2—*
- *[Parenopenst]CF2[Parenclosest]h*
- R4 is a substituent selected from the group consisting of:
- *—H
- *[Parenopenst]CF2[Parenclosest]fCF3
- R5 is a substituent selected from the group consisting of an alkyl, an aryl, and a heteroaryl radical;
- a is an integer from 0 to 1;
- b is an integer from 1 to 200;
- c is an integer from 0 10 200;
- d is an integer from 0 to 1;
- e is an integer from 0 to 10;
- f is an integer from 0 to 10;
- g is an integer from 0 to 10;
- h is an integer from 1 to 10;
- n is an integer from 0 to 1;
- and
- x is an integer from 0 to 10 if R3 is —CH2—.
30 more elements
A process for preparing a poly-o-hydroxyamide having a formula I
- wherein:
- Y2 is
- Y1 and Y3, in each case independently of one another, are a substituent selected from the group consisting of:
- Z1, Z2, and Z3, in each case independently, are substituents selected from the group consisting of:
- A, if at least one of a=0 and d=1, is a substituent selected from the group consisting of:
- A, if at least one of a=1 and d=0, is a substituent selected from the group consisting of:
- E is a substituent selected from the group consisting of:
- W is a substituent selected from the group consisting of:
- T is a substituent selected from the group consisting of:
- R1 is a substituent selected from the group consisting of:
- R2 is a substituent selected from the group consisting of —H, —CF3, —OH, —SH, —COOH, —N(R5)2, an alkyl group, an aryl group, a heteroaryl group and
- R3 is a substituent selected from the group consisting of:
- R4 is a substituent selected from the group consisting of:
- R5 is a substituent selected from the group consisting of an alkyl, an aryl, and a heteroaryl radical;
- a is an integer from 0 to 1;
- b is an integer from 1 to 200;
- c is an integer from 0 10 200;
- d is an integer from 0 to 1;
- e is an integer from 0 to 10;
- f is an integer from 0 to 10;
- g is an integer from 0 to 10;
- h is an integer from 1 to 10;
- n is an integer from 0 to 1;
- and
- x is an integer from 0 to 10 if R3 is —CH2—;
- the process which comprises:
- providing a monomer having a formula II
- reacting the monomer with at least one of a dicarboxylic acid and an activated dicarboxylic acid derivative having a formula III
- wherein:
- L is selected from the group consisting of a hydroxyl group and an activating group, and
- Y is selected from the group consisting of Y1, Y2, and Y3.
28 more elements
A process for preparing a polybenzoxazole, which comprises heating a poly-o-hydroxyamides having a formula I
- wherein:
- Y2 is
- Y1 and Y3, in each case independently of one another, are a substituent selected from the group consisting of:
- Z1, Z2, and Z3, in each case independently, are substituents selected from the group consisting of:
- A, if at least one of a=0 and d=1, is a substituent selected from the group consisting of:
- A, if at least one of a=1 and d=0, is a substituent selected from the group consisting of:
- E is a substituent selected from the group consisting of:
- W is a substituent selected from the group consisting of:
- T is a substituent selected from the group consisting of:
- R1 is a substituent selected from the group consisting of:
- R2 is a substituent selected from the group consisting of —H, —CF3, —OH, —SH, —COOH, —N(R5)2, an alkyl group, an aryl group, a heteroaryl group and
- R3 is a substituent selected from the group consisting of:
- R4 is a substituent selected from the group consisting of:
- R5 is a substituent selected from the group consisting of an alkyl, an aryl, and a heteroaryl radical;
- a is an integer from 0 to 1;
- b is an integer from 1 to 200;
- c is an integer from 0 10 200;
- d is an integer from 0 to 1;
- e is an integer from 0 to 10;
- f is an integer from 0 to 10;
- g is an integer from 0 to 10;
- h is an integer from 1 to 10;
- n is an integer from 0 to 1;
- and
- x is an integer from 0 to 10 if R3 is —CH2—.
22 more elements
Dependencies are inferred from the claim text.