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US 6,806,335 B2Granted
PolymEric compound and resin composition for photoresist
AssigneeDaicel Chemical Industries, Ltd.
InventorsYoshinori Funaki, Kiyoharu Tsutsumi, Akira Takaragi
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Abstract
A photoresist polymeric compound includes a monomer unit represented by following Formula (I): The polymeric compound may further include at least one of monomer units represented by Formulae (IIa) to (IIg) as described in the specification. The photoresist polymeric compound can exhibit high adhesion to substrates and can highly precisely form fine patterns.
Claims9
A polymeric compound for photoresist, comprising a monomer unit represented by following Formula (I):
- and having a weight average molecular weight (Mw) of from about 5000 to about 50000.
A polymeric compound for photoresist, comprising a monomer unit represented by following Formula (I):
- and having a weight average molecular weight (Mw) of from about 5000 to about 50000;
- wherein the polymeric compound further comprises at least one monomer unit selected from Formulae (IIa) to (IIg):
- wherein R1 is a hydrogen atom or a methyl group;
- R2 and R3 are the same or different and are each a hydrocarbon group having from 1 to 8 carbon atoms;
- R4, R5 and R6 are the same or different and are each a hydrogen atom, a hydroxyl group or a methyl group;
- R7 and R8 are the same or different and are each a hydrogen atom, a hydroxyl group or a —COOR9 group, where R9 is a t-butyl group, a 2-tetrahydrofuranyl group, a 2-tetrahydropyranyl group or an 2-oxepanyl group;
- R10 and R11 are the same or different and are each a hydrogen atom, a hydroxyl group or an oxo group;
- R12 is a hydrocarbon group having a tertiary carbon atom at a bonding site with an oxygen atom indicated in the formula;
- R13, R14 and R15 are the same or different and are each hydrogen atom or a methyl group;
- R16 is a t-butyl group, a 2-tetrahydrofuranyl group, a 2-tetrahydropyranyl group or an 2-oxepanyl group;
- and n denotes an integer from 1 to 3;
- with the proviso that when the polymeric compound contains a monomer unit of Formulae (IIg), the polymeric compound further comprises at least one of Formulae (IIa), (IIb), (IIc), (IId), (IIe), (IIf), (IIIa), (IIIb), (IIIc), (IIId), (IIIe), (IIIf) and (IIIg)
- wherein Formulae (IIIa) to (IIIg) have the following formulae:
- wherein R1 is a hydrogen atom or a methyl group;
- R17 and R18 are the same or different and are each a hydrogen atom, a hydroxyl group or a carboxyl group;
- R19 is a hydroxyl group, an oxo group or a carboxyl group;
- R20, R21, R22, R23 and R24 are the same or different and are each a hydrogen atom or a methyl group;
- R25 is a hydrogen atom or a methyl group;
- R26 is a tricyclo[5.2.1.02,6]decylmethyl group, a tetracyclo[4.4.0.12,5.17,10]dodecylmethyl group, a norbornyl group, an isobornyl group or a 2-norbornylmethyl group;
- and R27 is a substituent of R26 and is a hydrogen atom, a hydroxyl group, a hydroxymethyl group, a carboxyl group or a —COOR28 group, where R28 is a t-butyl group, a 2-tetrahydrofuranyl group, a 2-tetrahydropyranyl group or an 2-oxepanyl group.
17 more elements
Dependencies are inferred from the claim text.