Monolithic multi-wavelength vertical-cavity surface emitting laser array and method of manufacture therefor

A method for manufacturing a monolithic array of vertical cavity optical devices comprising:

• forming a first distributed Bragg reflector over a single wafer forming a photoactive semiconductor structure over the first distributed Bragg reflector;
• forming first and second sacrificial islands of a sacrificial layer over the photoactive semiconductor structure, the first and second sacrificial islands having respective first and second sizes, the first size different from the second size;
• forming a reflector support over the first and second sacrificial islands;
• forming second and third distributed Bragg reflectors over the reflector support;
• forming openings in the reflector support;
• and
• removing the first and second sacrificial islands through the. openings in the reflector support to form first and second air gaps whereby a first optical device is formed by the first distributed Bragg reflector, the photoactive semiconductor structure, the first air gap, and the second distributed Bragg reflector and whereby a second optical device is fanned by the first distributed Bragg reflector, the photoactive semiconductor structure, the second air gap, and the third distributed Bragg reflector.