Molded end point detection window for chemical mechanical planarization
AssigneeLam Research Corporation
InventorsCangshan Xu, Patrick P. H. Wu, Xuyen Pham
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Abstract
An optical window structure for use in chemical mechanical planarization is provided. The optical window structure includes a polishing pad and an optical window opening in the polishing pad. The optical window structure also includes a molded optical window attached to an underside of the polishing pad, a molded portion of the optical window at least partially protruding into the optical window opening in the polishing pad.
Claims32
An optical window structure for use in chemical mechanical planarization, comprising:
- a polishing pad;
- an optical window opening in the polishing pad;
- and
- a molded optical window attached to an underside of the polishing pad, a molded portion of the optical window at least partially protruding into the optical window opening in the polishing pad.
A method to generate an optical window structure, comprising:
- providing a polishing pad;
- generating an optical window opening in the polishing pad;
- molding an optical window;
- and
- attaching the molded optical window to an underside of the polishing pad so that a molded portion of the optical window at least partially into the optical window opening.
An optical window structure for use in chemical mechanical planarization, comprising:
- a polishing pad;
- an optical window opening in the polishing pad;
- and
- a optical window attached to an underside of the polishing pad, the optical window being molded so a molded portion of the optical window at least partially protrudes into the optical window opening in the polishing pad.
An optical window structure for use in chemical mechanical planarization, comprising:
- a multi-layer polishing pad;
- an optical window opening in the multi-layer polishing pad;
- and
- an optical window having a molded portion, the optical window being attached to an underside of the multi-layer polishing pad, the molded portion of the optical window at least partially protruding into the optical window opening.
A method to generate an optical window structure, comprising:
- providing a multi-layer polishing pad;
- generating an optical window opening in the multi-layer polishing pad;
- molding an optical window;
- and
- attaching the molded optical window the multi-layer polishing pad so that a molded portion of the optical window at least partially protrudes into the optical window opening.
Dependencies are inferred from the claim text.