Method for fabricating ferroelectric memory cells

A method for fabricating ferroelectric memory cells in accordance with the stacked principle, which comprises the steps of:

• providing a conductive plug formed of polysilicon;
• forming a bonding layer directly above the conductive plug and between a lower capacitor electrode of a ferroelectric storage capacitor and the conductive plug, the conductive plug being formed beneath the ferroelectric storage capacitor and electrically connecting the lower capacitor electrode to a transistor electrode of a selection transistor formed either in or on a semiconductor wafer;
• forming an oxygen diffusion barrier above the bonding layer;
• and
• performing a rapid thermal process (RTP) step in an oxygen atmosphere, after a ferroelectric deposition and before a ferro anneal has been performed, the RTP step including the steps of:
• determining the oxidation rate of the bonding layer and a first diffusion coefficient (Doxygen) of oxygen in a material of the bonding layer which depends on temperature;
• determining a second diffusion coefficient (Dsilicon) of silicon in the material of the bonding layer which depends on the temperature;
• and
• calculating an optimum temperature range for the RTP step from the first and second diffusion coefficients (Doxygen and Dsilicon) for a predetermined layer thickness and a layer width of a layer system formed of the bonding layer and the oxygen diffusion barrier from the relationship ( d BARR ) 2 D silicon ⁢ ⟨ ( b BARR ) 2 D oxygen
• in which the left-hand term denotes a period of time required for full siliciding of the bonding layer, and the right-hand term denotes a period of time required to fully oxidize the bonding layer,
• dBARR denotes the predetermined layer thickness of the layer system formed of the bonding layer and the oxygen diffusion barrier,
• bBARR denotes half the layer width of the layer system containing the bonding layer and the oxygen diffusion barrier, so that during the RTP step siliciding of the bonding layer takes place more quickly than its oxidation.