Positive radiation-sensitive composition

A positive radiation-sensitive composition comprising:

• (a) a resin whose solubility in an alkali developer increases by the action of an acid;
• (b) a compound that generates a carboxylic acid having a molecular weight of 100 or less upon irradiation with an actinic ray or a radiant ray;
• (c) a surfactant;
• and
• (d) a solvent,
• wherein compound (b) is present in an amount of from 1 to 20 wt % based upon the solid contents, and the compound (b) is a compound represented by the following formula (I):
• wherein R11, R12, R13, R14 and R15 each independently represents a hydrogen atom, a straight chain, branched or cyclic alkyl group, a straight chain, branched or cyclic alkoxyl group, a hydroxyl group, a halogen atom, or —S—R0;
• R0 represents a straight chain, branched or cyclic alkyl hydroxyl group, a halogen atom, or —S—R0;
• R0 represents a straight chain, branched or cyclic alkyl group, or an aryl group, A+ represents S+ or I+;
• B− represents CH3COO−, C2H5COO− or C3H7COO−;
• and m represents 2 or 3.