Thin permanent-magnet film and process for producing the same
AssigneeNeomax Co., Ltd.
InventorMinoru Uehara
Life of this patent
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Abstract
Refractory metal layers 2, 4, 6, 8, and 10, and rare earth alloy magnetic layers 3, 5, 7, 9, 11, and 12 are alternately deposited, so as to form a multilayer structure including four or more layers on a substrate. The refractory metal layers 2, 4, 6, 8, and 10 are formed from at least one kind of material selected from a group consisting of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W, and each has a thickness of not less than 5 nm nor more than 50 nm. The rare earth alloy magnetic layers 3, 5, 7, 9, 11, and 12 have tetragonal R2Fe14B (R is Nd and/or Pr) as a primary constituent phase, and each has a thickness of not less than 50 nm nor more than 500 nm.
Claims15
A thin film permanent magnet having a multilayer structure including four or more layers in which a refractory metal layer and rare earth alloy magnetic layer are alternately deposited, wherein
- the refractory metal layer is formed from a material selected from a group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta, W and combinations thereof, and has a thickness of not loss than 5 nm nor more than 50 nm, and
- the rare earth alloy magnetic layer has tetragonal R2Fe14B as a primary constituent phase (R is Nd and/or Pr), and has a thickness of not less than 50 nm nor more than 500 nm.
The thin film permanent magnet of claim, 1 wherein the rare earth alloy magnetic layer has magnetic anisotropy.
A method for producing a thin film permanent magnet comprising the steps of:
- preparing a substrate formed from a material having a melting point of 300° C. or more;
- and
- forming, on the substrate, a multilayer structure including four or more layers in which a refractory metal layer having a thickness of not less than 5 nm nor more than 50 nm formed from a material selected from a group consisting of Ti, V, Zr, Nb, Mo, Hf, Ta, W and combinations thereof, and a rare earth alloy magnetic layer having a thickness of not less than 50 nm nor more than 500 nm and having tetragonal R2Fe14B (R is Nd and/or Pr) as a primary constituent phase are alternately deposited.
Dependencies are inferred from the claim text.