Built-in purifier for horizontal liquefied gas cylinders
AssigneeAir Products and Chemicals, Inc.
InventorBenjamin Lee Hertzler
Life of this patent
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Abstract
An apparatus for purifying a gaseous product delivered from a horizontal container containing a supply of a fluid includes an elongated hollow tube inside the container and a purifying medium inside the tube. The tube has a first opening, a second opening spaced apart from the first opening, and an internal axis between the first and second openings. The first opening is in fluid communication with a port and the second opening is in fluid communication with a vapor space in the container. A portion of the internal axis adjacent the second opening is at an angle greater than zero degrees relative to the horizontal longitudinal axis of the container.
Claims22
An apparatus for purifying a gaseous product delivered from a substantially horizontal container adapted to contain a supply of a fluid, said container having a substantially horizontal longitudinal axis, at least one inner wall, a first end, a second end opposite said first end, a port adjacent said first end, and an open interior for containing said fluid between said at least one inner wall and said first and second ends, at least part of said open interior being a vapor space, comprising:
- an elongated hollow tube disposed in said open interior of said horizontal container, said elongated hollow tube having a first opening, a second opening spaced apart from said first opening, and an internal axis between the first and second openings, said first opening being in fluid communication with said port and said second opening being in fluid communication with said vapor space, wherein a portion of said internal axis adjacent said second opening is at an angle greater than zero degrees relative to said substantially horizontal longitudinal axis;
- and
- a purifying medium disposed in at least a portion of said elongated hollow tube between said first opening and said second opening.
An apparatus for purifying a gaseous product to be used in the fabrication of a semiconductor device, said product delivered from a substantially horizontal container having a substantially cylindrical shape adapted to contain a supply of a liquid, said container having a substantially horizontal longitudinal axis, at least one inner wall, a first end, a second end opposite said first end, a port adjacent said first end, and an open interior for containing said liquid between said at least one inner wall and said first and second ends, at least part of said open interior being a vapor space above a surface of said liquid, comprising:
- an elongated hollow tube disposed in said open interior of said horizontal container, said elongated hollow tube having a first opening, a second opening spaced apart from said first opening, said first opening being in fluid communication with said port and said second opening being in fluid communication with said vapor space, wherein a first portion of said tube proximate said first opening is substantially parallel to said substantially horizontal longitudinal axis and a second portion of said tube distal said first opening is at an angle greater than zero degrees relative to said substantially horizontal longitudinal axis;
- a purifying medium disposed in at least a portion of said elongated hollow tube between said first opening and said second opening, wherein said purifying medium comprises at least one layer of a material selected from a group consisting of at least one catalyst, at least one adsorbent, and at least one mixture thereof;
- a first filter disposed in said vapor space and in fluid communication with said second opening;
- a second filter adjacent said first opening and in fluid communication with said elongated hollow tube;
- and
- control means in fluid communication with said port and adapted to control delivery of said gaseous product from said substantially horizontal container and delivery of a source of said liquid to said substantially horizontal container.
A substantially horizontal container for containing a supply of a fluid and delivering a gaseous product, said container having a built-in purifier for purifying said gaseous product delivered from said container having a substantially horizontal longitudinal axis, at least one inner wall, a first end, a second end opposite said first end, a port adjacent said first end, and an open interior for containing said fluid between said at least one inner wall and said first and second ends, at least part of said open interior being a vapor space, wherein said built-in purifier comprises:
- an elongated hollow tube disposed in said open interior of said horizontal container, said elongated hollow tube having a first opening, a second opening spaced apart from said first opening, and an internal axis between the first and second openings, said first opening being in fluid communication with said port and said second opening being in fluid communication with said vapor space, wherein a portion of said internal axis adjacent said second opening is at an angle greater than zero degrees relative to said substantially horizontal longitudinal axis;
- and
- a purifying medium disposed in at least a portion of said elongated hollow tube between said first opening and said second opening.
A substantially horizontal container having a substantially cylindrical shape for containing a supply of a liquid having a substantially horizontal liquid surface and for delivering a gaseous product to be used in the fabrication of a semiconductor device, said container having a built-in purifier for purifying said gaseous product delivered from said container and having a substantially horizontal longitudinal axis, an inner wall, an outer wall, a first end, a second end opposite said first end, a port adjacent said first end, and an open interior for containing said liquid between said inner wall and said first and second ends, at least part of said open interior being a vapor space above said liquid surface, wherein said built-in purifier comprises:
- an elongated hollow tube disposed in said open interior of said horizontal container, said elongated hollow tube having a first opening, a second opening spaced apart from said first opening, and an internal axis between the first and second openings, said first opening being in fluid communication with said port and said second opening being in fluid communication with said vapor space, wherein a first portion of said tube proximate said first opening is substantially parallel to said substantially horizontal longitudinal axis and a second portion of said tube distal said first opening is at an angle greater than zero degrees relative to said substantially horizontal longitudinal axis;
- a purifying medium disposed in at least a portion of said elongated hollow tube between said first opening and said second opening, wherein said purifying medium comprises at least one layer of a material selected from a group consisting of at least one catalyst, at least one adsorbent, and at least one mixture thereof;
- a first filter disposed in said vapor space and in fluid communication with said second opening;
- a second filter adjacent said first opening and in fluid communication with said elongated hollow tube;
- and
- control means in fluid communication with said port and adapted to control delivery of said gaseous product from said substantially horizontal container and delivery of a source of said liquid to said substantially horizontal container.
Dependencies are inferred from the claim text.