Response microcantilever thermal detector
OwnerJoseph P. Cunningham, Slobodan Rajic +2inventors
InventorsJoseph P. Cunningham, Slobodan Rajic, Panagiotis G. Datskos, Boyd M. Evans, III
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Abstract
A “folded leg” thermal detector microcantilever constructed of a substrate with at least one leg interposed between a fixed end and a deflective end, each leg having at least three essentially parallel leg segments interconnected on alternate opposing ends and aligned in a serpentine pattern with only the first leg segment attached to the fixed end and only the last leg segment attached to the deflective end. Alternate leg segment are coated on the pentalever with coating applied to the top of the first, third, and fifth leg segments of each leg and to the bottom of the second and fourth leg segments of each leg.
Claims19
A microcantilever thermal detector comprising:
- a substrate having an upper side, lower side, fixed end, and deflective end,
- said substrate having at least one leg interposed between said fixed end and said deflective end,
- said leg comprising at least three essentially parallel leg segments interconnected on alternate opposing ends and aligned in a serpentine pattern with only the first leg segment attached to said fixed end and only the last leg segment attached to said deflective end, wherein a thermal change in said parallel lea segments causes a measurable deflection of the deflective end, which correlates to said thermal change.
Dependencies are inferred from the claim text.