Method & apparatus for monitoring plasma processing operations
AssigneeSandia Corporation
InventorsMichael Lane Smith, Jr., Pamela Denise Peardon Ward, Joel O'Don Stevenson
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Abstract
The invention generally relates to various aspects of a plasma process and, more specifically, to the monitoring of such plasma processes. One aspect relates to a plasma monitoring module that may be adjusted in at least some manner so as to re-evaluate a previously monitored plasma process. For instance, optical emissions data on a plasma process that was previously monitored by the plasma monitoring module may be replayed through the plasma monitoring module after making at least one adjustment in relation to the plasma monitoring module.
Claims18
A method for monitoring a plasma process, comprising the steps of:
- initiating a first plasma process within a first processing chamber;
- obtaining optical emissions data on said first plasma process;
- storing said optical emissions data from said obtaining step on a computer-readable storage medium system;
- executing a first monitoring step using a plasma monitoring module which is stored on said computer-readable storage medium system, said executing a first monitoring step comprising monitoring at least a first portion of said optical emissions data from said obtaining step;
- making at least one adjustment in relation to said plasma monitoring module after a completion of said executing a first monitoring step;
- and
- executing a second monitoring step using said plasma monitoring module, said executing a second monitoring step being initiated after said making at least one adjustment step, said executing a second monitoring step comprising monitoring at least a second portion of said optical emissions data from said storing step.
A method for monitoring a plasma process, comprising the steps of:
- running a first plasma process within a first processing chamber;
- obtaining optical emissions data on said first plasma process;
- executing a first monitoring step comprising monitoring at least a portion of said optical emissions data from said obtaining step;
- replaying at least a portion of said optical emissions data from said obtaining step;
- and
- executing a second monitoring step comprising monitoring said at least a portion of said optical emissions data from said replaying step, wherein said second monitoring step differs in at least one respect from said first monitoring step.
Dependencies are inferred from the claim text.