Decal transfer microfabrication
AssigneeThe Board of Trustees of the University of Illinois
InventorsRalph G. Nuzzo, William Robert Childs
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Abstract
A method of making a microstructure includes forming a pattern in a surface of a silicon-containing elastomer, oxidizing the pattern, contacting the pattern with a substrate; and bonding the oxidized pattern and the substrate such that the pattern and the substrate are irreversibly attached. The silicon-containing elastomer may be removably attached to a transfer pad.
Claims53
A method of making a microstructure, the method comprising:
- forming a pattern in a surface of a silicon-containing elastomer;
- oxidizing the pattern;
- contacting the oxidized pattern with a substrate;
- and
- bonding the oxidized pattern and the substrate such that the pattern and the substrate are irreversibly attached.
A method of making a microstructure, the method comprising:
- oxidizing a first surface of a film comprising a silicon-containing elastomer;
- wherein the first surface comprises a pattern, and the film is attached to a transfer pad;
- contacting the pattern with a substrate;
- bonding the pattern and the substrate such that the pattern and the substrate are irreversibly attached;
- and
- separating the transfer pad from the film.
A method of making a microstructure, comprising;
- oxidizing a silicon-containing elastomer;
- contacting the oxidized elastomer with a portion of a substrate;
- bonding the oxidized elastomer and the portion of the substrate to form a microstructure;
- wherein the elastomer is on the portion of the substrate, and the elastomer and the substrate are irreversibly attached;
- and
- applying an etching agent to the microstructure to remove a portion of the substrate which is not covered by the patterned silicon-containing elastomer.
A method of making a microstructure, comprising:
- oxidizing a silicon-containing elastomer;
- contacting the oxidized elastomer with a portion of a substrate;
- bonding the oxidized elastomer and the portion of the substrate to form a microstructure;
- wherein the elastomer is on the portion of the substrate, and the elastomer and the substrate are irreversibly attached;
- depositing a material on the microstructure;
- and
- removing the silicon-containing elastomer to provide the deposited material on a portion of the substrate which was not covered by the silicon-containing elastomer.
Dependencies are inferred from the claim text.