Ozonated water flow and concentration control apparatus
AssigneeApplied Science and Technology, Inc.
InventorsJens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Abstract
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Claims5
A ozonated water control unit comprising:
- an ozonated water input port for receiving ozonated water having a first concentration from an ozonated water generator;
- a water input port for receiving water from a source;
- an ozonated water output port in fluid communication with the ozonated water input port and the water input port;
- a valve for controlling a flow rate of water in the water input port to produce ozonated water having a second concentration in the output port, in cooperation with a flow rate of ozonated water in the ozonated water input port a second ozonated water output port in fluid communication with the ozonated water input port and the water input port, the second ozonated water output port for supplying ozonated water having a third concentration.
A ozonated water supply system, comprising:
- an ozonated water generator;
- a first ozonated water control unit in fluid communication with the ozonated water generator, the control unit comprising:
- an ozonated water input port for receiving ozonated water having a first concentration from the ozonated water generator;
- a water input port for receiving water from a source;
- an ozonated water output port in fluid communication with the ozonated water input port and the water input port;
- and
- a valve for controlling a flow rate of water in the water input port to produce ozonated water having a second concentration in the output port, in cooperation with a flow rate of ozonated water in the ozonated water input port, and
- a second ozonated water control unit in fluid communication with the ozonated water generator for supplying ozonated water having a third concentration to a second process tool while supplying ozonated water having the second concentration to a first process tool.
Dependencies are inferred from the claim text.