Plasma generation using multi-step ionization
AssigneeZond, Inc.
InventorRoman Chistyakov
Life of this patent
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Abstract
The present invention relates to a plasma generator that generates a plasma with a multi-step ionization process. The plasma generator includes an excited atom source that generates excited atoms from ground state atoms supplied by a feed gas source. A plasma chamber confines a volume of excited atoms generated by the excited atom source. An energy source is coupled to the volume of excited atoms confined by the plasma chamber. The energy source raises an energy of excited atoms in the volume of excited atoms so that at least a portion of the excited atoms in the volume of excited atoms is ionized, thereby generating a plasma with a multi-step ionization process.
Claims46
A plasma generator that generates a plasma with a multi-step ionization process, the plasma generator comprising:
- a feed gas source comprising ground state atoms;
- an excited atom source that receives ground state atoms from the feed gas source, the excited atom source comprising a magnet that generates a magnetic field for substantially trapping electrons proximate to the ground state atoms, the excited atom source generating excited atoms from the ground state atoms;
- a plasma chamber that is coupled to the excited atom source, the plasma chamber confining a volume of excited atoms generated by the excited atom source;
- and
- an energy source that is coupled to the volume of excited atoms confined by the plasma chamber, the energy source raising an energy of excited atoms in the volume of excited atoms so that at least a portion of the excited atoms in the volume of excited atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A plasma generator that generates a plasma with a multi-step ionization process, the plasma generator comprising:
- a feed gas source comprising ground state atoms;
- a metastable atom source that receives ground state atoms from the feed gas source, the metastable atom source comprising a magnet that generates a magnetic field for substantially trapping electrons proximate to the ground state atoms, the metastable atom source generating metastable atoms from the ground state atoms;
- a plasma chamber that is coupled to the metastable atom source, the plasma chamber confining a volume of metastable atoms generated by the metastable atom source;
- and
- a power supply that is electrically coupled to the volume of metastable atoms confined by the plasma chamber, the power supply generating a power that raises an energy of metastable atoms in the volume of metastable atoms so that at least a portion of the metastable atoms in the volume of metastable atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A method for generating a plasma with a multi-step ionization process, the method comprising:
- generating a magnetic field proximate to a volume of ground state atoms to substantially trap electrons proximate to the volume of ground state atoms;
- generating a volume of metastable atoms from the volume of ground state atoms;
- and
- raising an energy of the metastable atoms so that at least a portion of the volume of metastable atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A method for generating a plasma with a multi-step ionization process, the method comprising:
- generating a magnetic field proximate to a volume of ground state molecules to substantially trap electrons proximate to the volume of ground state molecules;
- generating a volume of metastable molecules from the volume of ground state molecules;
- and
- raising an energy of the metastable molecules so that at least a portion of the volume of metastable molecules is ionized, thereby generating a plasma with a multi-step ionization process.
An apparatus for generating a plasma comprising:
- means for generating a magnetic field proximate to a volume of ground state atoms to substantially trap electrons proximate to the volume of ground state atoms;
- means for generating a volume of metastable atoms from the volume of ground state atoms;
- and
- means for raising an energy of the metastable atoms so that at least a portion of the volume of metastable atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A plasma generator that generates a plasma with a multi-step ionization process, the plasma generator comprising:
- a feed gas source comprising ground state atoms;
- an excited atom source that is coupled to the feed gas source, the excited atom source generating excited atoms from the ground state atoms;
- a plasma chamber that is coupled to the excited atom source, the plasma chamber confining a volume of excited atoms generated by the excited atom source, wherein a pressure differential exists between a pressure in the excited atom source and a pressure in the plasma chamber, the pressure differential increasing at least one of a rate at which the excited atoms are generated from the ground state atoms and a density of the excited atoms;
- and
- an energy source that is coupled to the volume of excited atoms confined by the plasma chamber, the energy source raising an energy of excited atoms in the volume of excited atoms so that at least a portion of the excited atoms in the volume of excited atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A plasma generator that generates a plasma with a multi-step ionization process, the plasma generator comprising:
- a feed gas source comprising ground state atoms;
- an inductively coupled discharge source that is coupled to the feed gas source, the inductively coupled discharge source generating excited atoms from the ground state atoms;
- a plasma chamber that is coupled to the inductively coupled discharge source, the plasma chamber confining a volume of excited atoms generated by the inductively coupled discharge source;
- and
- an energy source that is coupled to the volume of excited atoms confined by the plasma chamber, the energy source raising an energy of excited atoms in the volume of excited atoms so that at least a portion of the excited atoms in the volume of excited atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A plasma generator that generates a plasma with a multi-step ionization process, the plasma generator comprising:
- a feed gas source comprising ground state atoms;
- an excited atom source that is coupled to the feed gas source, the excited atom source generating excited atoms from the ground state atoms;
- an electron/ion absorber that receives the excited atoms generated by the excited atom source and then traps elections and ions;
- a plasma chamber that is coupled to the electron/ion absorber, the plasma chamber confining a volume of excited atoms generated by the excited atom source;
- and
- an energy source that is coupled to the volume of excited atoms confined by the plasma chamber, the energy source raising an energy of excited atoms in the volume of excited atoms so that at least a portion of the excited atoms in the volume of excited atoms is ionized, thereby generating a plasma with a multi-step ionization process.
A method for generating a plasma with a multi-step ionization process, the method comprising:
- generating a volume of metastable atoms from a volume of ground state atoms;
- trapping electrons and ions in the volume of metastable atoms;
- and
- raising an energy of the metastable atoms so that at least a portion of the volume of metastable atoms is ionized, thereby generating a plasma with a multi-step ionization process.
Dependencies are inferred from the claim text.