Method of manufacturing flat panel display device
AssigneeSamsung SDI Co., Ltd.
InventorsWoo-Young So, Kyung-Jin Yoo, Sang-II Park
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Abstract
A flat panel display device with improved electrical characteristics and a simplified manufacturing process is disclosed. The device includes a semiconductor layer formed on an insulating substrate; source and drain electrodes directly contacting both end portions of the semiconductor layer, respectively; a pixel electrode having an opening portion formed thereon; a first insulating layer formed over the remaining portion of the insulating substrate except for the opening portion; a gate electrode formed on a portion of the first insulating layer over the semiconductor layer; and source and drain regions formed in both end portions of the semiconductor layer.
Claims8
A method of manufacturing a flat panel display device, comprising:
- forming a semiconductor layer on an insulating layer;
- ion-implanting an impurity having a first conductivity into the semiconductor layer;
- forming source electrode and a drain electrodes, the source electrode contacting a first end portion of the semiconductor layer and the drain electrodes contacting a second end portion of the semiconductor layer;
- ion implanting an impurity having a second conductivity into the semiconductor layer to form a high-density source region, and a high-density drain regions and a channel area, the high-density source region contacting the source electrode and high-density drain region contacting the drain electrodes;
- forming a first insulting layer over a surface of the insulating substrate;
- forming a pixel electrode having an opening formed thereon;
- and
- forming a gate electrode on a portion of the first insulating layer formed over the semiconductor layer.
Dependencies are inferred from the claim text.