Method for removing contamination particles from substrates
AssigneeApplied Materials, Inc.
InventorsJoel Brad Bailey, Reginald W. Hunter
Life of this patent
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Abstract
Embodiments of the invention provide a method for removing contaminant particles from a substrate surface, where the method includes supporting a substrate in a face up position on a substrate support member and imparting a broadband impulse to the substrate support member in a direction that is substantially perpendicular to a surface of the substrate. The broadband impulse applied to the substrate support is calculated to be of sufficient magnitude to dislodge contamination particles from the surface of the substrate. The method further includes removing dislodged particles from an area proximate the substrate surface.
Claims20
A method for removing contaminant particles from a substrate surface, comprising:
- supporting a substrate in a face up position on a substrate support member;
- actuating a piston assembly positioned in a stem of the substrate support member, the actuating causing the piston assembly to travel toward the substrate and contact a terminating end, the contact with the terminating end operating to generate a broadband impulse in a direction that is substantially perpendicular to a surface of the substrate, the broadband impulse being of sufficient magnitude to dislodge contamination particles from the surface of the substrate;
- and
- removing dislodged particles from an area proximate the substrate surface.
A method for cleaning contaminants from a substrate surface, comprising:
- clamping a substrate to a substrate support member,
- generating a broadband impulse with a broadband actuator device positioned in a stem portion of the substrate support member;
- transferring the broadband impulse to a substrate receiving surface of the support member via a substrate reinforcement member positioned between the substrate receiving surface and the stem portion to dislodge particles from the substrate;
- and
- removing dislodged particles from an area proximate the substrate.
A method for removing contaminant particle from a substrate surface, comprising:
- securing a substrate to a substrate support member with a means for securing;
- actuating the substrate support member with a broadband impulse with a means for actuating, the means for actuating being in communication with the substrate support member via a semi-hemispherical reinforcement member, wherein actuating transfers the broadband impulse to the substrate;
- removing particles dislodged from the substrate support with the broadband impulse with a means for removing.
Dependencies are inferred from the claim text.