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US 6,805,008 B2Granted
Accelerometer with folded beams
AssigneeInput/Output, Inc.
InventorsArjun Selvakumar, Duli Yu, Lianzhong Yu, Ben W. Jones
Life of this patent
Estimating the term…
Abstract
Disclosed is an accelerometer for measuring seismic data. The accelerometer includes a proof mass that is resiliently coupled to a support structure by folded beams, S-shaped balanced beams, straight beams, and/or folded beams with resonance damping. The support structure further includes travel stops for limiting transverse motion of the proof mass.
Claims46
An accelerometer, comprising:
- a measurement mass for detecting acceleration, including:
- a housing having a cavity;
- one or more spring mass assemblies positioned within the cavity, each spring mass assembly including:
- a support structure;
- one or more resilient folded beams coupled to the support structure;
- and
- a mass coupled to the resilient folded beams;
- and
- one or more electrode patterns coupled to the spring mass assembly;
- a top cap wafer coupled to the measurement mass, including a top capacitor electrode;
- and
- a bottom cap wafer coupled to the measurement mass, including a bottom capacitor electrode.
9 more elements
An accelerometer, comprising:
- a measurement mass for detecting acceleration, including:
- a housing having a cavity;
- one or more spring mass assemblies positioned within the cavity,
- each spring mass assembly including:
- a support structure;
- one or more resilient S-shaped beams coupled to the support structure;
- and
- a mass coupled to the resilient S-shaped beams;
- and
- one or more electrode patterns coupled to the spring mass assembly;
- a top cap wafer coupled to the measurement mass, including a top capacitor electrode;
- and
- a bottom cap wafer coupled to the measurement mass, including a bottom capacitor electrode.
10 more elements
An accelerometer, comprising:
- a measurement mass for detecting acceleration, including:
- a housing having a cavity;
- one or more spring mass assemblies positioned within the cavity,
- each spring mass assembly including:
- a support structure;
- one or more resilient straight beams coupled to the support structure;
- and
- a mass coupled to the resilient straight beams;
- and
- one or more electrode patterns coupled to the spring mass assembly;
- a top cap wafer coupled to the measurement mass, including a top capacitor electrode;
- and
- a bottom cap wafer coupled to the measurement mass, including a bottom capacitor electrode.
10 more elements
An accelerometer, comprising:
- a measurement mass for detecting acceleration, including:
- a housing having a cavity;
- one or more spring mass assemblies positioned within the cavity,
- each spring mass assembly including:
- a support structure;
- one or more resilient beams coupled to the support structure;
- and
- a mass coupled to the resilient beams;
- and
- one or more electrode patterns coupled to the spring mass assembly;
- a top cap wafer coupled to the measurement mass, including a top capacitor electrode;
- and
- a bottom cap wafer coupled to the measurement mass, including a bottom capacitor electrode;
- wherein the resilient beams are selected from the group consisting of folded resilient beams, S-shaped beams, and straight beams.
11 more elements
A sensor package, comprising:
- (a) a sensor having a mass suspended by a plurality of springs which induce mechanical vibrational modes in the sensor, the sensor providing an output signal indicative of acceleration detected by the mass;
- (b) a controller coupled to the sensor in a closed-loop configuration, the controller in response to the output signal of the sensor providing a digital output proportional to the acceleration detected by the sensor, the controller in the closed-loop operation having at least one predefined frequency band for stable operation relative to the frequency of mechanical vibrational modes induced in sensor;
- and wherein the plurality of springs are tuned so that the frequency of the induced mechanical vibrational modes remains substantially within at least one predetermined frequency band.
A sensor package, comprising:
- (a) a sensor having a mass suspended from a structure by a plurality of springs which induce mechanical vibrational modes in at least one direction of movement of the mass, the amplitude of the induced mechanical vibrational modes being a function of the mass of the springs;
- (b) a controller coupled to the sensor in a closed loop operation for providing a digital output proportional to the acceleration detected by the sensor, the controller having a predetermined amplitude threshold level for detecting any mechanical vibrational modes of the sensor;
- and
- wherein the mass of the springs is selected so that the amplitude of the mechanical vibrational modes induced in the sensor remains below the predetermined amplitude threshold level of the controller.
1 more element
Dependencies are inferred from the claim text.