Process control based on tool health data

An apparatus, comprising:

• an interface adapted to receive trace data associated with processing a semiconductor wafer of a lot;
• and
• a controller communicatively coupled to the interface, the controller adapted to:
• determine health data associated with one or more components of the processing tool based on at least a portion of the received trace data;
• and
• adjust processing of another semiconductor wafer in the lot based on the determined health data.

An apparatus, comprising:

• means for processing a workpiece using a processing tool;
• means for receiving trace data associated with the processing of the workpiece from the processing tool;
• means for determining at least one value associated with a health of a portion of the processing tool based on at least a portion of the received trace data;
• and
• means for adjusting processing of another workpiece based on the determined health value.

An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:

• receive trace data associated with processing of a wafer by a processing tool;
• generate one or more health statistics associated with the operation of the processing tool based on at least a portion of the received trace data;
• and
• provide at least one of the health statistic to a controller to adjust one or more parameters of the recipe based on the at least one health statistic.

An apparatus, comprising:

• an interface;
• and
• a controller communicatively coupled to the interface, the controller adapted to:
• receive one or more health statistics associated with a processing tool that is under direction of the controller;
• calculate at least one parameter of a recipe based on the one or more health statistics;
• and
• cause processing of a wafer based on the at least one calculated recipe parameter.

A system, comprising:

• a processing tool adapted to provide trace data associated with a processing of a wafer of a lot;
• a fault detection and classification system adapted to:
• determine one or more health statistics associated with a health of a processing tool based on at least a portion of the trace data;
• and
• provide the one or more health statistics to a controller;
• and
• a controller for controlling the processing of the processing tool, the controller adapted to adjust the processing of a next wafer of the lot based on at least one of the health statistics.