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US 6,802,045 B1Granted
Method and apparatus for incorporating control simulation environment
AssigneeAdvanced Micro Devices, Inc.
InventorsThomas J. Sonderman, Anthony J. Toprac, Anastasia Oshelski Peterson
Life of this patent
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Abstract
The present invention provides for a method and an apparatus for implementing a control simulation environment into a manufacturing environment. A process task is defined. A process simulation function is performed to produce simulation data corresponding to the process task. The simulation data is integrated with a process control environment for controlling a manufacturing process of a semiconductor device.
Claims31
A method, comprising:
- defining a process task;
- performing a process simulation function to produce simulation data corresponding to said process task, performing said process simulation function comprising:
- generating a first model to perform a simulation;
- generating a second model for processing a semiconductor device, an operation of said second model being capable of affecting said first model;
- and
- interfacing said simulation data with a process control environment for controlling a manufacturing process of said semiconductor device using at least one of said first and second model.
3 more elements
An apparatus, comprising:
- means for defining a process task;
- means for performing a process simulation function to produce simulation data corresponding to said process task;
- and
- means for interfacing said simulation data with a process control environment for controlling a manufacturing process of a semiconductor device.
1 more element
A method, comprising:
- defining a process task;
- performing a process simulation function to produce simulation data corresponding to said process task, said process simulation function comprising:
- preparing at least one processing model for simulation;
- executing a simulation using said processing model to generate a simulation result;
- generating a defined model based upon said simulation;
- determining whether said simulation result is within a predetermined specification;
- and
- applying said simulation result into at least one manufacturing parameter in response to a determination that said simulation result is within said predetermined specification;
- preparing an acquired model from said data;
- populating said defined model with said acquired model;
- and
- interfacing said simulation data with a process control environment for controlling a manufacturing process of a semiconductor device using said defined model.
9 more elements
A method, comprising:
- defining a process task;
- performing a process simulation function to produce simulation data corresponding to
- said process task;
- performing said process simulation function comprising:
- preparing at least one processing model for simulation to generate a defined model;
- validating said defined model by determining whether said simulation result is within a predetermined specification;
- acquiring data for operation of said defined model;
- preparing an acquired model from said data for operation;
- populating said defined model with at least a portion of said acquired model;
- and
- interfacing said simulation data with a process control environment for controlling a manufacturing process of said semiconductor device using at least one of said defined model and said acquired model.
8 more elements
Dependencies are inferred from the claim text.