System and method for manufacturing semiconductor devices controlled by customer

A system for manufacturing semiconductor devices, comprising:

• a customer information management apparatus, capable of being logged-into by customers via a network, for receiving orders from said customers;
• a manufacturing management apparatus, connected between said customer information management apparatus, and processing units and inspection units, for controlling said processing units and said inspection units in accordance with said orders in said customer information management apparatus,
• each of said orders including a designated quantity of lots, a designated substrate, designated processing units, designated recipes thereof, designated inspection units and designated inspection recipes thereof,
• the designated recipes and designated inspection recipes being stored in advance in the customer information management apparatus, the designated recipes and designated inspection recipes respectively corresponding to processes of the designated processing units and the designated inspection units, and the designated recipes and designated inspection recipes serving as selection bases for developing said orders.

A method for manufacturing semiconductor devices, comprising the steps of:

• logging-in by a customer via a network to a customer information management apparatus provided on a manufacturer side, so that a manufacturing condition file specialized for said customer is read and edited by using recipes stored in recipe files, thus preparing an order;
• calculating an estimated time for delivery of semiconductor device lots of said order;
• determining whether said order is to be proceeded with or cancelled in accordance with said estimated time for delivery of semiconductor device lots;
• operating processing units and inspection units to manufacture and inspect said semiconductor device lots only when said order is determined to be proceeded with;
• and
• transmitting a start time and an end time of each of said processing units and inspection result of said inspection units via said network to said customer, wherein,
• the recipes stored in recipe files are stored in advance of the customer log-in and reflect available processes of the processing units and the inspection units, the recipes serving as selection bases for developing the order.